ArF激光产生的微等离子体的时间分辨发射研究。

Time-resolved emission studies of ArF-laser-produced microplasmas.

作者信息

Simeonsson J B, Miziolek A W

出版信息

Appl Opt. 1993 Feb 20;32(6):939-47. doi: 10.1364/AO.32.000939.

DOI:10.1364/AO.32.000939

PMID:20802771

Abstract

ArF-laser-produced microplasmas in CO, CO(2), methanol, and chloroform are studied by time-resolved emission measurements of the plasma decay. Electron densities are deduced from Stark broadening of the line profiles of atomic H, C, O, and Cl. Plasma ionization and excitation temperatures are determined from measurements of relative populations of ionic and neutral species produced in the plasmas. A discussion of the thermodynamic equilibrium status of ArF-laser microplasmas is presented. In general, the ArF-laser-produced microplasma environment is found to be similar in all the gases studied, in terms of both temperature (15,000-20,000 K) and electron density (10(17) cm(-3)-10(18) cm(-3)), despite the considerable differences observed in the breakdown thresholds and relative energies deposited in the various gases.

摘要

通过对等离子体衰变的时间分辨发射测量，研究了在一氧化碳、二氧化碳、甲醇和氯仿中由ArF激光产生的微等离子体。电子密度由原子H、C、O和Cl的谱线轮廓的斯塔克展宽推导得出。等离子体电离温度和激发温度通过测量等离子体中产生的离子和中性物种的相对丰度来确定。本文对ArF激光微等离子体的热力学平衡状态进行了讨论。总体而言，尽管在各种气体的击穿阈值和沉积的相对能量方面观察到了显著差异，但在所研究的所有气体中，发现ArF激光产生的微等离子体环境在温度（15000 - 20000 K）和电子密度（10¹⁷ cm⁻³ - 10¹⁸ cm⁻³）方面是相似的。