Wang Yung-Cheng, Shyu Lih-Horng, Chang Chung-Ping
Institute of Mechanical Engineering, National Yunlin University of Science and Technology, Douliou, Yunlin 640, Taiwan.
Rev Sci Instrum. 2010 Sep;81(9):093102. doi: 10.1063/1.3480551.
The optical configuration of a Fabry-Pérot interferometer is uncomplicated. This has already been applied in different measurement systems. For the displacement measurement with the Fabry-Pérot interferometer, the result is significantly influenced by the tilt angles of the measurement mirror in the interferometer. Hence, only for the rather small measuring range, the Fabry-Pérot interferometer is available. The goal of this investigation is to enhance the measuring range of Fabry-Pérot interferometer by compensating the tilt angles. To verify the measuring characteristic of the self-developed Fabry-Pérot interferometer, some comparison measurements with a reference standard have been performed. The maximum deviation of comparison experiments is less than 0.3 μm in the traveling range of 30 mm. The experimental results show that the Fabry-Pérot interferometer is highly stable, insensitive to environment effects, and can meet the measuring requirement of the submicrometer order.
法布里-珀罗干涉仪的光学结构并不复杂。这已经在不同的测量系统中得到应用。对于用法布里-珀罗干涉仪进行位移测量，测量结果会受到干涉仪中测量镜倾斜角度的显著影响。因此，仅在相当小的测量范围内，法布里-珀罗干涉仪才适用。本研究的目的是通过补偿倾斜角度来扩大法布里-珀罗干涉仪的测量范围。为了验证自行研制的法布里-珀罗干涉仪的测量特性，已经与参考标准进行了一些对比测量。在30毫米的行程范围内，对比实验的最大偏差小于0.3微米。实验结果表明，法布里-珀罗干涉仪具有高度稳定性，对环境影响不敏感，能够满足亚微米级的测量要求。
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