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采用纳米压印光刻技术制造的单层和多层超材料。

Single and multilayer metamaterials fabricated by nanoimprint lithography.

机构信息

Functional Surfaces and Nanostructures, PROFACTOR GmbH, Im Stadtgut A2, 4407 Steyr-Gleink, Austria.

出版信息

Nanotechnology. 2011 Aug 12;22(32):325301. doi: 10.1088/0957-4484/22/32/325301. Epub 2011 Jul 14.

Abstract

We demonstrate for the first time a fast and easy nanoimprint lithography (NIL) based stacking process of negative index structures like fishnet and Swiss-cross metamaterials. The process takes a few seconds, is cheap and produces three-dimensional (3D) negative index materials (NIMs) on a large area which is suitable for mass production. It can be performed on all common substrates even on flexible plastic foils. This work is therefore an important step toward novel and breakthrough applications of NIMs such as cloaking devices, perfect lenses and magnification of objects using NIM prisms. The optical properties of the fabricated samples were measured by means of transmission and reflection spectroscopy. From the measured data we retrieved the effective refractive index which is shown to be negative for a wavelength around 1.8 µm for the fishnet metamaterial while the Swiss-cross metamaterial samples show a distinct resonance at wavelength around 1.4 µm.

摘要

我们首次展示了一种快速简便的基于负折射率结构(如鱼网和瑞士十字超材料)的纳米压印光刻(NIL)堆叠工艺。该工艺只需几秒钟,成本低廉,可在大面积上制作出适用于大规模生产的三维(3D)负折射率材料(NIM)。它可以在所有常见的衬底上进行,甚至可以在柔性塑料箔上进行。因此,这项工作是朝着使用 NIM 棱镜实现隐形装置、完美透镜和物体放大等突破性应用迈出的重要一步。通过透射和反射光谱测量了所制备样品的光学性质。从测量数据中我们得到了有效折射率,对于鱼网超材料,在 1.8 µm 左右的波长处表现为负折射率,而瑞士十字超材料样品在 1.4 µm 左右的波长处表现出明显的共振。

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