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硅纳米图案与类金刚石碳和全氟聚醚薄膜的润湿行为和纳米摩擦学性能。

Wetting behavior and nanotribological properties of silicon nanopatterns combined with diamond-like carbon and perfluoropolyether films.

机构信息

Center for BioMicrosystems, Korea Institute of Science and Technology, Seoul, Republic of Korea.

出版信息

Nanotechnology. 2011 Sep 30;22(39):395303. doi: 10.1088/0957-4484/22/39/395303. Epub 2011 Sep 6.

DOI:10.1088/0957-4484/22/39/395303
PMID:21896974
Abstract

A large number of silicon (Si) patterns consisting of nanopillars of varying diameter and pitch have been fabricated and further coated with diamond-like carbon (DLC) and perfluoropolyether (Z-DOL) films. The wetting behavior and nano-adhesion/friction of the patterns are investigated experimentally in relation to the nanostructures and the hydrophobicity of the materials. Measurements of water contact angle illustrate that the patterning-enhanced wettability of the Si flat surface, along with two distinct wettings which are in good agreement with the Wenzel and hemi-wicking states, depended on the value of the pitch-over-diameter ratio. In the case of the coated patterns, three wetting states are observed: the Cassie-Baxter, the Wenzel, and a transition from the Cassie-Baxter into the Wenzel, which varies with regard to the hydrophobic properties of the DLC and Z-DOL. In terms of tribological properties, it is demonstrated that a combination of the nanopatterns and the films is effective in reducing adhesive and frictional forces. In addition, the pitch and diameter of the patterns are found to significantly influence their adhesion/friction behaviors.

摘要

已经制造了大量由不同直径和间距的纳米柱组成的硅(Si)图案,并进一步涂覆了类金刚石碳(DLC)和全氟聚醚(Z-DOL)薄膜。实验研究了图案的润湿性和纳米附着力/摩擦与纳米结构和材料疏水性之间的关系。水接触角的测量表明,Si 平面表面的图案增强润湿性以及两种明显的润湿状态,与 Wenzel 和半吸湿性状态非常吻合,取决于间距与直径比的值。对于涂覆的图案,观察到三种润湿状态:Cassie-Baxter、Wenzel 和 Cassie-Baxter 向 Wenzel 的转变,这取决于 DLC 和 Z-DOL 的疏水性。就摩擦学性能而言,已经证明纳米图案和薄膜的组合可有效降低粘附力和摩擦力。此外,发现图案的间距和直径显著影响其附着力/摩擦行为。

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