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基于单层和多层 MoS2 薄膜的场效应晶体管的制备及其在室温下对 NO 的传感性能研究。

Fabrication of single- and multilayer MoS2 film-based field-effect transistors for sensing NO at room temperature.

机构信息

School of Materials Science and Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798, Singapore.

出版信息

Small. 2012 Jan 9;8(1):63-7. doi: 10.1002/smll.201101016. Epub 2011 Oct 20.

DOI:10.1002/smll.201101016
PMID:22012880
Abstract

Single- and multilayer MoS(2) films are deposited onto Si/SiO(2) using the mechanical exfoliation technique. The films were then used for the fabrication of field-effect transistors (FETs). These FET devices can be used as gas sensors to detect nitrous oxide (NO). Although the single-layer MoS(2) device shows a rapid response after exposure to NO, the current was found to be unstable. The two-, three-, and four-layer MoS(2) devices show both stable and sensitive responses to NO down to a concentration of 0.8 ppm.

摘要

采用机械剥离技术将单层和多层 MoS(2) 薄膜沉积在 Si/SiO(2) 上。然后,将这些薄膜用于制造场效应晶体管 (FET)。这些 FET 器件可用作气体传感器来检测一氧化二氮 (NO)。虽然在暴露于 NO 后,单层 MoS(2) 器件显示出快速响应,但发现电流不稳定。而对于 2 层、3 层和 4 层 MoS(2) 器件,即使在 0.8 ppm 的低浓度下,也能对 NO 表现出稳定和敏感的响应。

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