Electrical and Computer Engineering Department, University of Patras, 26500 Rio, Achaia, Greece.
ISA Trans. 2012 Mar;51(2):325-32. doi: 10.1016/j.isatra.2011.11.002. Epub 2011 Dec 3.
In the present article, a sliding mode controller is proposed for a micro-cantilever beam (μCB) with fringing and squeezed film damping effects. The narrow micro-cantilever beam can move via the application of an external electrically induced force. The introduction of the squeezed film parameters results in a frequency-dependent nonlinear system. Particular attention, has been paid, in order to approximate the frequency dependent μCB model, with a valid, frequency independent one, that would be incorporated in the design of a robust sliding mode controller. The suggested control technique enables compact realization of a robust controller tolerant in device characteristics' variations, nonlinearities and types of inherent instabilities. Robustness of the proposed control scheme against disturbances is proved by Lyapunov's second method. In addition, bifurcation analysis is carried on the beam's nonlinear model, and numerous simulation test cases are presented in order to test the suggested modeling and control techniques.
本文提出了一种用于具有边缘和挤压膜阻尼效应的微悬臂梁（μCB）的滑模控制器。窄微悬臂梁可以通过施加外部电致动力来移动。引入挤压膜参数会导致一个频率相关的非线性系统。特别注意的是，为了近似于频率相关的μCB 模型，采用了一个有效的、与频率无关的模型，该模型将被纳入鲁棒滑模控制器的设计中。所提出的控制技术能够紧凑地实现对器件特性变化、非线性和固有不稳定性类型具有鲁棒性的控制器。通过 Lyapunov 第二方法证明了所提出的控制方案对干扰的鲁棒性。此外，对梁的非线性模型进行了分岔分析，并提出了大量的仿真案例，以验证所提出的建模和控制技术。
