脉冲调制微波对电子回旋共振离子源产生富勒烯离子的影响。

Effect of pulse-modulated microwaves on fullerene ion production with electron cyclotron resonance ion source.

作者信息

Asaji T, Uchida T, Minezaki H, Oshima K, Racz R, Muramatsu M, Biri S, Kitagawa A, Kato Y, Yoshida Y

机构信息

Tateyama Machine Co. Ltd., 30 Shimonoban, Toyama, Toyama 930-1305, Japan.

出版信息

Rev Sci Instrum. 2012 Feb;83(2):02A303. doi: 10.1063/1.3656428.

DOI:10.1063/1.3656428

Abstract

Fullerene plasmas generated by pulse-modulated microwaves have been investigated under typical conditions at the Bio-Nano electron cyclotron resonance ion source. The effect of the pulse modulation is distinct from that of simply structured gases, and then the density of the fullerene plasmas increased as decreasing the duty ratio. The density for a pulse width of 10 μs at the period of 100 μs is 1.34 times higher than that for CW mode. We have studied the responses of fullerene and argon plasmas to pulsed microwaves. After the turnoff of microwave power, fullerene plasmas lasted ∼30 times longer than argon plasmas.

摘要

在生物纳米电子回旋共振离子源的典型条件下，对脉冲调制微波产生的富勒烯等离子体进行了研究。脉冲调制的效果与简单结构气体的效果不同，随着占空比的降低，富勒烯等离子体的密度增加。在100μs周期下，10μs脉冲宽度的密度比连续波模式下的密度高1.34倍。我们研究了富勒烯和氩等离子体对脉冲微波的响应。在微波功率关闭后，富勒烯等离子体的持续时间比氩等离子体长约30倍。

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