School of Electromechanical Automobile Engineering, Yantai University, 32 Qingquan Road, Yantai 264005, China.
Department of Mechanical and Electromechanical Engineering, National ILan University, 1 Section, Shen-Lung Road, ILan 260, Taiwan.
Sensors (Basel). 2012;12(2):1170-1180. doi: 10.3390/s120201170. Epub 2012 Jan 30.
There is no literature mentioning the electromechanical behavior of micro structures driven by traveling electrostatic forces. This article is thus the first to present the dynamics and stabilities of a micro-ring subjected to a traveling electrostatic force. The traveling electrostatic force may be induced by sequentially actuated electrodes which are arranged around the flexible micro-ring. The analysis is based on a linearized distributed model considering the electromechanical coupling effects between electrostatic force and structure. The micro-ring will resonate when the traveling speeds of the electrostatic force approach some critical speeds. The critical speeds are equal to the ratio of the natural frequencies to the wave number of the correlative natural mode of the ring. Apart from resonance, the ring may be unstable at some unstable traveling speeds. The unstable regions appear not only near the critical speeds, but also near some fractions of some critical speeds differences. Furthermore the unstable regions expand with increasing driving voltage. This article may lead to a new research branch on electrostatic-driven micro devices.
目前尚无文献提及由行波静电驱动力驱动的微结构的机电行为。因此，本文首次提出了在行波静电力作用下微环的动力学和稳定性。行波静电力可由沿柔性微环排列的顺序激励电极感应产生。该分析基于考虑静电力与结构之间的机电耦合效应的线性分布模型。当行波静电力的速度接近某些临界速度时，微环将发生共振。临界速度等于相关自然模式的固有频率与波数的比值。除了共振，在某些不稳定的行波速度下，环可能不稳定。不稳定区域不仅出现在临界速度附近，还出现在一些临界速度差的分数附近。此外，不稳定区域随驱动电压的增加而扩大。本文可能会开创静电驱动微器件的新研究分支。
