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纳米晶金刚石光学平面波导的特性设计与研究

Design and investigation of properties of nanocrystalline diamond optical planar waveguides.

作者信息

Prajzler Vaclav, Varga Marian, Nekvindova Pavla, Remes Zdenek, Kromka Alexander

机构信息

Department of Microelectronics, Faculty of Electrical Engineering, Czech Technical University in Prague, Technicka 2, 166 27 Prague 6, Czech Republic.

出版信息

Opt Express. 2013 Apr 8;21(7):8417-25. doi: 10.1364/OE.21.008417.

Abstract

Diamond thin films have remarkable properties comparable with natural diamond. Because of these properties it is a very promising material for many various applications (sensors, heat sink, optical mirrors, chemical and radiation wear, cold cathodes, tissue engineering, etc.) In this paper we report about design, deposition and measurement of properties of optical planar waveguides fabricated from nanocrystalline diamond thin films. The nanocrystalline diamond planar waveguide was deposited by microwave plasma enhanced chemical vapor deposition and the structure of the deposited film was studied by scanning electron microscopy and Raman spectroscopy. The design of the presented planar waveguides was realized on the bases of modified dispersion equation and was schemed for 632.8 nm, 964 nm, 1 310 nm and 1 550 nm wavelengths. Waveguiding properties were examined by prism coupling technique and it was found that the diamond based planar optical element guided one fundamental mode for all measured wavelengths. Values of the refractive indices of our NCD thin film measured at various wavelengths were almost the same as those of natural diamond.

摘要

金刚石薄膜具有与天然金刚石相当的显著特性。由于这些特性,它是一种非常有前途的材料,可用于许多不同的应用(传感器、散热器、光学镜、化学和辐射磨损、冷阴极、组织工程等)。在本文中,我们报告了由纳米晶金刚石薄膜制成的光学平面波导的设计、沉积和性能测量。纳米晶金刚石平面波导通过微波等离子体增强化学气相沉积法沉积,并用扫描电子显微镜和拉曼光谱研究了沉积薄膜的结构。所呈现的平面波导的设计基于修正的色散方程实现,并针对632.8纳米、964纳米、1310纳米和1550纳米波长进行了规划。通过棱镜耦合技术检测了波导特性,发现基于金刚石的平面光学元件在所有测量波长下都能引导一个基模。我们的非晶金刚石薄膜在不同波长下测量的折射率值与天然金刚石的折射率值几乎相同。

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