Whole ceramic-like microreactors from inorganic polymers for high temperature or/and high pressure chemical syntheses.

Two types of whole ceramic-like microreactors were fabricated from inorganic polymers, polysilsesquioxane (POSS) and polyvinylsilazane (PVSZ), that were embedded with either perfluoroalkoxy (PFA) tube or polystyrene (PS) film templates, and subsequently the templates were removed by physical removal (PFA tube) or thermal decomposition (PS). A POSS derived ceramic-like microreactor with a 10 cm long serpentine channel was obtained by an additional "selective blocking of microchannel" step and subsequent annealing at 300 °C for 1 h, while a PVSZ derived ceramic-like microreactor with a 14 cm long channel was yielded by a co-firing process of the PVSZ-PS composite at 500 °C for 2 h that led to complete decomposition of the film template leaving a microchannel behind. The obtained whole ceramic-like microfluidic devices revealed excellent chemical and thermal stabilities in various solvents, and they were able to demonstrate unique chemical performance at high temperature or/and high pressure conditions such as Michaelis-Arbuzov rearrangement at 150-170 °C, Wolff-Kishner reduction at 200 °C, synthesis of super-paramagnetic Fe3O4 nanoparticles at 320 °C and isomerisation of allyloxybenzene to 2-allylphenol (250 °C and 400 psi). These economic ceramic-like microreactors fabricated by a facile non-lithographic method displayed excellent utility under challenging conditions that is superior to any plastic microreactors and comparable to glass and metal microreactors with high cost.