Modeling and experimental analysis of the linear ultrasonic motor with in-plane bending and longitudinal mode.

A novel linear ultrasonic motor based on in-plane longitudinal and bending mode vibration is presented in this paper. The stator of the motor is composed of a metal plate and eight piezoelectric ceramic patches. There are four long holes in the plate, designed for consideration of the longitudinal and bending mode coupling. The corresponding model is developed to optimize the mechanical and electrical coupling of the stator, which causes an ellipse motion at the contact tip of the stator when the composite vibrations with longitudinal and bending are excited. Its harmonic and transient responses are simulated and inspected. A prototype based on the model is fabricated and used to conduct experiments. Results show that the amplitude of the stator's contact tips is significantly increased, which helps to amplify the driving force and speed of the motor. It is therefore feasible to implement effective linear movement using the developed prototype.