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基于内反射的湿度和压力传感器。

Humidity and pressure sensor based on internal reflection.

作者信息

Domenegueti J F M, Zilio S C

出版信息

Appl Opt. 2014 Mar 10;53(8):1591-6. doi: 10.1364/AO.53.001591.

Abstract

A low-cost humidity and pressure optical sensor, based on the internal reflection phenomenon, is presented. It takes advantage of the phase difference acquired by s- and p-polarized light undergoing internal reflection to generate an easily detectable minimum in the reflected profile, in a position corresponding to the critical angle. The apparatus presents good sensitivity to relative humidity changes above 70% and a response time below one second. The same device is also capable of measuring changes in pressure and can be used as a vacuum gauge between 1 and 1000 mbar.

摘要

本文介绍了一种基于内反射现象的低成本湿度和压力光学传感器。它利用s偏振光和p偏振光在发生内反射时获得的相位差,在对应于临界角的位置产生一个易于检测的反射轮廓最小值。该装置对70%以上的相对湿度变化具有良好的灵敏度,响应时间小于1秒。同一装置还能够测量压力变化,并可用作1至1000毫巴之间的真空计。

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