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飞秒激光脉冲表面微结构化对半绝缘砷化镓光吸收和光电流的增强作用

Optical absorption and photocurrent enhancement in semi-insulating gallium arsenide by femtosecond laser pulse surface microstructuring.

作者信息

Zhao Zhen-Yu, Song Zhi-Qiang, Shi Wang-Zhou, Zhao Quan-Zhong

出版信息

Opt Express. 2014 May 19;22(10):11654-9. doi: 10.1364/OE.22.011654.

Abstract

We observe an enhancement of optical absorption and photocurrent from semi-insulating gallium arsenide (SI-GaAs) irradiated by femtosecond laser pulses. The SI-GaAs wafer is treated by a regeneratively amplified Ti: Sapphire laser of 120 fs laser pulse at 800 nm wavelength. The laser ablation induced 0.74 μm periodic ripples, and its optical absorption-edge is shifted to a longer wavelength. Meanwhile, the steady photocurrent of irradiated SI-GaAs is found to enhance 50%. The electrical properties of samples are calibrated by van der Pauw method. It is found that femtosecond laser ablation causes a microscale anti-reflection coating surface which enhances the absorption and photoconductivity.

摘要

我们观察到,飞秒激光脉冲辐照半绝缘砷化镓(SI-GaAs)后,其光吸收和光电流增强。用波长800nm、激光脉冲为120fs的再生放大钛宝石激光器对SI-GaAs晶片进行处理。激光烧蚀产生了0.74μm的周期性波纹,其光吸收边移向更长波长。同时,发现辐照后的SI-GaAs的稳态光电流增强了50%。用范德堡法校准样品的电学性质。发现飞秒激光烧蚀形成了一个微尺度抗反射涂层表面,增强了吸收和光电导性。

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