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揭示在银的辅助下通过HF/HNO₃各向同性蚀刻制备的形状多样的硅纳米线。

Unveiling the shape-diversified silicon nanowires made by HF/HNO3 isotropic etching with the assistance of silver.

作者信息

Chen Chia-Yun, Wong Ching-Ping

机构信息

Department of Applied Materials and Optoelectronic Engineering, National Chi Nan University, No.1, Daxue Rd., Puli Township, Nantou County 545, Taiwan.

出版信息

Nanoscale. 2015 Jan 21;7(3):1216-23. doi: 10.1039/c4nr05949b.

Abstract

Hydrofluoric (HF)/nitric (HNO3)/acetic (CH3COOH) acid, normally referred to as the HNA method, is a widely utilized technique for performing isotropic etching on silicon (Si) in industrial Si-based processing and device construction. Here, we reported a novel etching strategy based on a HF/HNO3 process with the assistance of silver (Ag) nano-seeds, offering good controllability in preparing diversified Si nanostructure arrays with particularly smooth top surfaces. The involved mechanism was visualized by systematically investigating both the time and temperature dependencies on the etching kinetics with various ratios of HF to HNO3. Moreover, by testing different Ag(+)-ion containing oxidants on Si etching, we have re-examined the state-of-the-art metal-assisted chemical etching (MaCE) using HF/AgNO3 etchants. In contrast with previous reports, we found that the interplay of hole injections from Ag(+) and NO3(-) ions to the valence band of Si collectively contributes to the unidirectional dissolution of Si. Finally, we explored the engineering of the Ag nano-seeds to regularize the orientation of the etched nanowires formed on non-Si (100) wafers, which further provides a reliable pathway for constructing the desired morphologies of one-dimensional Si nanostructures regardless of wafer orientation.

摘要

氢氟酸(HF)/硝酸(HNO₃)/乙酸(CH₃COOH)酸,通常称为HNA法,是工业硅基加工和器件制造中对硅(Si)进行各向同性蚀刻的一种广泛应用的技术。在此,我们报道了一种基于HF/HNO₃工艺并借助银(Ag)纳米种子的新型蚀刻策略,该策略在制备具有特别光滑顶面的多样化硅纳米结构阵列方面具有良好的可控性。通过系统研究HF与HNO₃不同比例下蚀刻动力学对时间和温度的依赖性,揭示了其中涉及的机制。此外,通过测试不同含Ag(+)离子的氧化剂对硅蚀刻的影响,我们重新审视了使用HF/AgNO₃蚀刻剂的先进金属辅助化学蚀刻(MaCE)。与先前的报道不同,我们发现Ag(+)和NO₃(-)离子向硅价带的空穴注入相互作用共同导致了硅的单向溶解。最后,我们探索了对Ag纳米种子进行工程处理,以规整在非Si(100)晶片上形成的蚀刻纳米线的取向,这进一步为构建所需形态的一维硅纳米结构提供了可靠途径,而无需考虑晶片取向。

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