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声空化气泡对微米级腔体的穿透。

The penetration of acoustic cavitation bubbles into micrometer-scale cavities.

作者信息

Vaidya Haresh Anant, Ertunç Özgür, Lichtenegger Thomas, Delgado Antonio, Skupin Andreas

机构信息

Institute of Fluid Mechanics, University of Erlangen-Nuremberg, D-91058 Erlangen, Germany; Erlangen Graduate School of Advanced Optical Technologies (SAOT), University of Erlangen-Nuremberg, D-91052 Erlangen, Germany.

Department of Mechanical Engineering, Ozyegin University, 34662 Istanbul, Turkey.

出版信息

Ultrasonics. 2016 Apr;67:190-198. doi: 10.1016/j.ultras.2015.12.009. Epub 2015 Dec 21.

Abstract

The penetration of acoustically induced cavitation bubbles in micrometer-scale cavities is investigated experimentally by means of high-speed photography and acoustic measurements. Micrometer-scale cavities of different dimensions (width=40 μm, 80 μm, 10 mm and depth=50 μm) are designed to replicate the cross section of microvias in a PCB. The aim here is to present a method for enhancing mass transfer due to the penetration of bubbles in such narrow geometries under the action of ultrasound. The micrometer-scale cavities are placed in a test-cell filled with water and subjected to an ultrasound excitation at 75 kHz. A cavitation bubble cluster is generated at the mouth of the cavity which acts as a continuous source of bubbles that penetrate into the cavity. The radial oscillation characteristics and translation of these bubbles are investigated in detail here. It is observed that the bubbles arrange themselves into streamer-like structures inside the cavity. Parameters such as bubble population and size distribution and their correlation with the phase of the incident ultrasound radiation are investigated in detail here. This provides a valuable insight into the dynamics of bubbles in narrow confined spaces. Mass transfer investigations show that fresh liquid can be continuously introduced in the cavities under the action of ultrasound. Our findings may have important consequences in optimizing the filling processes for microvias with high aspect ratios.

摘要

通过高速摄影和声测量手段,对声学诱导空化气泡在微米级腔体中的渗透进行了实验研究。设计了不同尺寸(宽度 = 40μm、80μm、10mm,深度 = 50μm)的微米级腔体,以复制印刷电路板中微通孔的横截面。目的是提出一种方法,用于在超声作用下,增强气泡在这种狭窄几何形状中渗透时的传质。将微米级腔体置于充满水的测试池中,并施加75kHz的超声激励。在腔体开口处产生一个空化气泡簇,它作为气泡的连续源渗透到腔体内。在此详细研究了这些气泡的径向振荡特性和平移情况。观察到气泡在腔体内排列成束状结构。在此详细研究了气泡数量、尺寸分布等参数及其与入射超声辐射相位的相关性。这为深入了解狭窄受限空间中气泡的动力学提供了有价值的见解。传质研究表明,在超声作用下,新鲜液体可不断引入腔体内。我们的研究结果可能对优化高纵横比微通孔的填充工艺具有重要意义。

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