Wang Lei, Gong Sidi, Yang Cihui, Wen Jing
School of Information Engineering, Nanchang Hangkong University, 330063, Nanchang, China.
Recent Pat Nanotechnol. 2017;11(1):75-80. doi: 10.2174/1872210510666160729092758.
The necessity to handle mechanical functionality at nanoscale has recently motivated the prosperity of the nanoelectromechanical systems (NEMs). The fabrication of NEMS strongly depends on the so-called "topdown" techniques that are however limited by the resolution of electronbeam lithography. Meanwhile, the size of the NEMS needs to be shrunk continuously in order to further enhance the system performance. As a result, current research interest has been dedicated to "bottomup" techniques or even a hybridization of two aforementioned approaches, leading to the presence of the nanowire-based NEMs. Here, we presented some recent patent for nanowire-based NEMS.
We investigate the resonant frequency and the frequency tuneability of the nanowire-based nanoelectromechanical system using Ge2Sb2Te5 media. By varying the nanowire dimensions, corresponding resonant frequencies and frequency tuneability are calculated using an established mechanical model.
We theoretically study the frequency tuneability of the nanowire-based NEMs using GST media. The resonant frequencies and the corresponding frequency tuneabilities for different nanowire dimensions are investigated using a developed mechanical model, and a previously established electrothermal model is performed to imitate the frequency tuning behavior of the system along with the phase-change phenomenon. By carefully controlling the amorphous fraction of the active region, a very high resonant frequency can be tuned within an ultra-high adjustable bandwidth. In addition, the merits of the phase-change memories including great scalability, low power consumption, fast transition time, and non-volatility can be also found on the proposed system. These results will open up a route for designing the next generation NEMs, and also pioneer a new application field for the GST media.
Today phase-change materials have received a wide range of applications from nonvolatile memories to neuromorphic networks due to its unique combinations of structural, electrical, and thermal properties. However, as the mechanical properties of phase-change materials exhibits a remarkable difference between the amorphous and crystalline phases, the feasibility of continuously changing the resonant frequency of the nanowires based on phase-change materials becomes viable.
处理纳米级机械功能的必要性最近推动了纳米机电系统(NEMS)的蓬勃发展。NEMS的制造强烈依赖于所谓的“自上而下”技术,然而该技术受电子束光刻分辨率的限制。同时,为了进一步提高系统性能,NEMS的尺寸需要不断缩小。因此,当前的研究兴趣致力于“自下而上”技术,甚至是上述两种方法的混合,从而产生了基于纳米线的NEMS。在此,我们展示了一些基于纳米线的NEMS的近期专利。
我们使用Ge2Sb2Te5介质研究了基于纳米线的纳米机电系统的共振频率和频率可调性。通过改变纳米线尺寸,使用已建立的力学模型计算相应的共振频率和频率可调性。
我们从理论上研究了使用GST介质的基于纳米线的NEMS的频率可调性。使用开发的力学模型研究了不同纳米线尺寸的共振频率和相应的频率可调性,并使用先前建立的电热模型来模拟系统的频率调谐行为以及相变现象。通过仔细控制有源区的非晶分数,可以在超高可调带宽内调谐非常高的共振频率。此外,在所提出的系统中还可以发现相变存储器的优点,包括高可扩展性、低功耗、快速转换时间和非易失性。这些结果将为设计下一代NEMS开辟一条途径,也为GST介质开拓一个新的应用领域。
如今,相变材料因其独特的结构、电学和热学性质组合,已在从非易失性存储器到神经形态网络等广泛领域得到应用。然而,由于相变材料的机械性能在非晶相和晶相之间表现出显著差异,基于相变材料的纳米线连续改变共振频率的可行性变得可行。