Lettieri Thomas R, Hartman Arie W, Hembree Gary G, Marx Egon
National Institute of Standards and Technology, Gaithersburg, MD 20899.
J Res Natl Inst Stand Technol. 1991 Nov-Dec;96(6):669-691. doi: 10.6028/jres.096.044.
Experimental, theoretical, and calculational details are presented for the three independent micrometrology techniques used to certify the mean diameter of Standard Reference Materisd 1960, nominal 10 μm diameter polystyrene spheres ("space beads"). The mean diameters determined by the three techniques agreed remarkably well, with all measurements within 0.1% of each other, an unprecedented achievement in the dimensional metrology of microspheres. Center distance finding (CDF), a method based on optical microscopy, gave a value of 9.89 ± 0.04 μm, which was chosen to be the certified mean diameter. The supporting measurements were done using metrology electron microscopy (MEM) and resonance light scattering (RLS). The MEM technique, based on scanning electron microscopy, yielded 9.89±0.06 μm for the mean diameter of the microspheres in vacuum, while the RLS value was 9.90 ±0.03 μm for the microspheres in liquid suspension. The main peak of the diameter distribution for SRM 1960 is nearly Gaussian with a certified standard deviation of 0.09 μm, as determined by CDF. Off the main peak, there are about 1% oversized particles and a negligible amount of undersized particles. The report gives a detailed description of the apparatus, the experimental methods, the data-reduction techniques, and an error analysis for each of the micro-metrology techniques. A distinctive characteristic of this SRM is that it was manufactured in microgravity aboard the NASA space shuttle Challenger and is the first commercial product to be made in space.
本文介绍了用于认证标准参考物质1960(标称直径为10μm的聚苯乙烯球,即“空间珠”)平均直径的三种独立微计量技术的实验、理论和计算细节。通过这三种技术测定的平均直径非常吻合,所有测量值之间的差异在0.1%以内,这在微球尺寸计量方面是一项前所未有的成就。基于光学显微镜的中心距离测量法(CDF)得出的值为9.89±0.04μm,该值被选为认证平均直径。辅助测量使用了计量电子显微镜(MEM)和共振光散射(RLS)。基于扫描电子显微镜的MEM技术在真空中测得微球的平均直径为9.89±0.06μm,而RLS技术在液体悬浮液中测得的微球平均直径为9.90±0.03μm。通过CDF测定,SRM 1960直径分布的主峰近似高斯分布,认证标准偏差为0.09μm。在主峰之外,约有1%的颗粒尺寸过大,尺寸过小的颗粒数量可忽略不计。该报告详细描述了每种微计量技术所使用的仪器、实验方法、数据处理技术以及误差分析。这种标准参考物质的一个显著特点是它是在美国国家航空航天局“挑战者”号航天飞机上的微重力环境中制造的,并且是首个在太空制造的商业产品。