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具有大范围和低噪声的α-β圆形扫描。

The α-β circular scanning with large range and low noise.

作者信息

Liu J, You X, Wang Y, Gu K, Liu C, Tan J

机构信息

Centre of Ultra-Precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin, China.

出版信息

J Microsc. 2017 May;266(2):107-114. doi: 10.1111/jmi.12515. Epub 2017 Mar 15.

Abstract

A circular-route scanning method called α-β circular scanning is proposed and realized using sinusoidal signals with a constant phase difference of π/2. Experiments show that the circular scanning range of α-β circular scanning is 57% greater than the rectangular scanning range of raster scanning within an effective optical field of view. Moreover, the scanning speed is improved by 7.8% over raster scanning because the whole sine signal is utilized in α-β circular scanning whereas the flyback area of the saw-tooth signal needs to be discarded in raster scanning. The maximum scanning acceleration decreases by a factor of 44, drastically decreasing the high noise, which should considerably elongate the lifetime of the galvanometers while inhibiting internal vibration. The proposed α-β circular scanning technique could be used in scanning imaging, optical tweezers and laser-beam fabrication.

摘要

提出并实现了一种名为α-β圆周扫描的圆周路径扫描方法,该方法使用具有π/2恒定相位差的正弦信号。实验表明,在有效光学视场内,α-β圆周扫描的圆周扫描范围比光栅扫描的矩形扫描范围大57%。此外,α-β圆周扫描的扫描速度比光栅扫描提高了7.8%,这是因为α-β圆周扫描利用了整个正弦信号,而光栅扫描需要丢弃锯齿信号的回扫区域。最大扫描加速度降低了44倍,大大降低了高噪声,这将显著延长振镜的使用寿命,同时抑制内部振动。所提出的α-β圆周扫描技术可用于扫描成像、光镊和激光束加工。

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