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一种基于填充微球的微图案电极的微压力传感方法。

A Micro-Pressure Sensing Method Based on the Micropatterned Electrodes Filled with the Microspheres.

作者信息

Cui Jianli, Zhang Binzhen, Duan Junping, Guo Hao, Tang Jun

机构信息

Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan 030051, Shanxi, China.

出版信息

Materials (Basel). 2017 Dec 18;10(12):1439. doi: 10.3390/ma10121439.

DOI:10.3390/ma10121439
PMID:29258232
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC5744374/
Abstract

As the core component of the sense of touch, flexible pressure sensors are critical to synchronized interactions with the surrounding environment. Here, we introduce a new type of flexible capacitive pressure sensor based on a template of electrodes, with a one-dimensional pyramid micropatterned structure on a Polydimethylsiloxane (PDMS) substrate and a dielectric layer of polystyrene (PS) microspheres. The proposed sensor exhibits a stable and high sensing sensitivity of 0.741 kPa to capacitance, good durability over 1000 cycles, and fast response time (<150 ms). Our flexible capacitive sensor responds not only to pressure but also to bending forces. Our device can be used to monitor the location and distribution of weight pressure. The proposed capacitive pressure sensor has itself been applied foreground in lots of aspects, such as electronic skins, wearable robotics, and biomedical devices.

摘要

作为触觉的核心组成部分,柔性压力传感器对于与周围环境的同步交互至关重要。在此,我们介绍一种新型的基于电极模板的柔性电容式压力传感器,其在聚二甲基硅氧烷(PDMS)基板上具有一维金字塔微图案结构以及聚苯乙烯(PS)微球介电层。所提出的传感器表现出对电容稳定且高的传感灵敏度,为0.741 kPa,在1000次循环中具有良好的耐久性,以及快速响应时间(<150毫秒)。我们的柔性电容式传感器不仅对压力有响应,而且对弯曲力也有响应。我们的装置可用于监测重量压力的位置和分布。所提出的电容式压力传感器在电子皮肤、可穿戴机器人和生物医学设备等许多方面都有应用前景。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b03a/5744374/1d9f31ec11d0/materials-10-01439-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b03a/5744374/a44489f9670b/materials-10-01439-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b03a/5744374/35bac1f4a30b/materials-10-01439-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b03a/5744374/4d91e6d2ae14/materials-10-01439-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b03a/5744374/6fd010e4f7ab/materials-10-01439-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b03a/5744374/1d9f31ec11d0/materials-10-01439-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b03a/5744374/a44489f9670b/materials-10-01439-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b03a/5744374/35bac1f4a30b/materials-10-01439-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b03a/5744374/4d91e6d2ae14/materials-10-01439-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b03a/5744374/6fd010e4f7ab/materials-10-01439-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b03a/5744374/1d9f31ec11d0/materials-10-01439-g005.jpg

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