Zhang Xiang, Li Haotong, Wang Zhenxing, Chen Xueye, Li Qian
School of Mechanics & Engineering Science, Zhengzhou University, Zhengzhou, 450001, China.
National Center for International Joint Research of Micro-Nano Molding Technology, Zhengzhou University, Zhengzhou, 450001, China.
Biomed Microdevices. 2018 Nov 6;20(4):96. doi: 10.1007/s10544-018-0342-0.
Polymer microfluidic devices are used for many purposes such as microarrays and biochips. The key tool for manufacturing these chips in bulk is an appropriate mold. However, the popular material for making molds is nickel or nickel alloys, which have low stiffness and wear out easily. Zr-based metallic glass is a promising material for micro- or nanomolds because it has good mechanical properties and can be easily formed with high precision. In this paper, Zr-based metallic glass is proposed for use as micromold insert to make poly-(methyl methacrylate) (PMMA) microfluidic devices. Our experiments show that they have good feature integrity and replication quality. Microchannels we fabricated using these replicas did not leak and had good flow performance. Zr-based metallic glass can greatly ease the manufacture of plastic microfluidic devices for research and commercial applications.
聚合物微流控装置被用于多种用途，如微阵列和生物芯片。批量制造这些芯片的关键工具是合适的模具。然而，制造模具常用的材料是镍或镍合金，它们刚度低且容易磨损。锆基金属玻璃是用于微模具或纳米模具的一种很有前景的材料，因为它具有良好的机械性能，并且能够容易地高精度成型。在本文中，提出使用锆基金属玻璃作为微模具镶件来制造聚甲基丙烯酸甲酯（PMMA）微流控装置。我们的实验表明，它们具有良好的特征完整性和复制质量。我们使用这些复制品制造的微通道没有泄漏并且具有良好的流动性能。锆基金属玻璃能够极大地简化用于研究和商业应用的塑料微流控装置的制造。
