Robotic Research Laboratory, Center of Excellence in Experimental Solid Mechanics and Dynamics, School of Mechanical Engineering, Iran University of Science and Technology, Tehran, Iran.
Microsc Res Tech. 2019 Oct;82(10):1787-1801. doi: 10.1002/jemt.23345. Epub 2019 Jul 22.
This article deals with the modeling and simulation of the vibration behavior of piezoelectric micro-cantilever (MC) based on the Timoshenko theory and using multi-scale (MTS) method in the air environment. In this regard, the results are compared with the previous literature, such as the finite element method and the MTS method. The analysis of the piezoelectric MC vibrating behavior is investigated in a dynamical mode including non-contact and tapping modes. The dynamics of this system is affected by interferential forces between probe tip and sample surface, such as van der Waals, capillary, and contact forces. According to the results, the forces applied to the probe tip reduce the amplitude and the resonance frequency. The simulation of surface topography in non-contact mode and tapping for rectangular and wedge-shaped roughness in the air environment are presented. Various experiments have been conducted in Ara research Company using the atomic force microscopy device in the amplitude mode. In the NSC15 Cantilever, the first natural frequency is derived from the results of the MC simulation based on Timoshenko beam theory, the practical results are 295.85 and 296.12 kHz, and the error rate is 0.09; at higher natural frequencies, the error rate has been increased. The γ coefficient is a measure of the nonlinear effects on the system; the effect of the piezoelectric length and width on γ coefficient is also investigated.
本文基于铁木辛柯理论和多尺度（MTS）方法，在空气环境中对基于压电的微悬臂梁（MC）的振动行为进行建模和仿真。在这方面，将结果与先前的文献，如有限元法和 MTS 方法进行了比较。研究了包括非接触和敲击模式在内的动态模式下的压电 MC 振动行为。该系统的动力学受到探针尖端和样品表面之间的干涉力的影响，如范德华力、毛细作用力和接触力。结果表明，施加到探针尖端的力会降低振幅和共振频率。在空气环境中，对非接触模式和敲击模式下矩形和楔形粗糙度的表面形貌进行了模拟。在 Ara 研究公司使用原子力显微镜设备在幅度模式下进行了各种实验。在 NSC15 悬臂梁中，根据基于铁木辛柯梁理论的 MC 仿真结果得出了第一固有频率，实际结果为 295.85 和 296.12 kHz，误差率为 0.09；在更高的固有频率下，误差率已经增加。γ 系数是衡量系统非线性效应的指标；还研究了压电长度和宽度对 γ 系数的影响。
