Verhoeven W, van Rens J F M, Kemper A H, Rietman E H, van Doorn H A, Koole I, Kieft E R, Mutsaers P H A, Luiten O J
Department of Applied Physics, Coherence and Quantum Technology Group, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands.
Thermo Fisher Scientific, Achtseweg Noord 5, 5651 GG Eindhoven, The Netherlands.
Rev Sci Instrum. 2019 Aug;90(8):083703. doi: 10.1063/1.5080003.
Microwave cavities oscillating in the TM mode can be used as dynamic electron-optical elements inside an electron microscope. By filling the cavity with a dielectric material, it becomes more compact and power efficient, facilitating the implementation in an electron microscope. However, the incorporation of the dielectric material makes the manufacturing process more difficult. Presented here are the steps taken to characterize the dielectric material and to reproducibly fabricate dielectric filled cavities. Also presented are two versions with improved capabilities. The first, called a dual-mode cavity, is designed to support two modes simultaneously. The second has been optimized for low power consumption. With this optimized cavity, a magnetic field strength of 2.84 ± 0.07 mT was generated at an input power of 14.2 ± 0.2 W. Due to the low input powers and small dimensions, these dielectric cavities are ideal as electron-optical elements for electron microscopy setups.
以TM模式振荡的微波腔可作为电子显微镜内部的动态电子光学元件。通过在腔中填充介电材料，它变得更加紧凑且功率高效，便于在电子显微镜中实现。然而，介电材料的加入使制造过程更加困难。这里介绍了表征介电材料以及可重复制造填充介电材料的腔体所采取的步骤。还介绍了两种具有改进功能的版本。第一种称为双模腔，设计用于同时支持两种模式。第二种已针对低功耗进行了优化。使用这种优化后的腔体，在输入功率为14.2±0.2 W时产生了2.84±0.07 mT的磁场强度。由于输入功率低且尺寸小，这些介电腔非常适合作为电子显微镜设置中的电子光学元件。
