利用聚焦离子束处理提高主动压电阻抗原子力显微镜探针的灵敏度。
Sensitivity Improvement to Active Piezoresistive AFM Probes Using Focused Ion Beam Processing.
机构信息
Faculty of Microsystems, Electronics and Photonics, Wroclaw University of Science and Technology, 50-372 Wroclaw, Poland.
Department of Micro- and Nanoelectronic Systems (MNES), Institute of Micro and Nanoelectronics, Ilmenau University of Technology, Gustav-Kirchhoff-Str.1, 98693 Ilmenau, Germany.
出版信息
Sensors (Basel). 2019 Oct 12;19(20):4429. doi: 10.3390/s19204429.
This paper presents a comprehensive modeling and experimental verification of active piezoresistive atomic force microscopy (AFM) cantilevers, which are the technology enabling high-resolution and high-speed surface measurements. The mechanical structure of the cantilevers integrating Wheatstone piezoresistive was modified with the use of focused ion beam (FIB) technology in order to increase the deflection sensitivity with minimal influence on structure stiffness and its resonance frequency. The FIB procedure was conducted based on the finite element modeling (FEM) methods. In order to monitor the increase in deflection sensitivity, the active piezoresistive cantilever was deflected using an actuator integrated within, which ensures reliable and precise assessment of the sensor properties. The proposed procedure led to a 2.5 increase in the deflection sensitivity, which was compared with the results of the calibration routine and analytical calculations.
本文提出了一种全面的建模和实验验证主动压阻原子力显微镜（AFM）悬臂梁的方法，该方法是实现高分辨率和高速表面测量的技术。利用聚焦离子束（FIB）技术对集成惠斯通电桥压阻的悬臂梁的机械结构进行了修改，以在最小影响结构刚度及其共振频率的情况下提高挠度灵敏度。FIB 过程是基于有限元建模（FEM）方法进行的。为了监测挠度灵敏度的增加，使用集成在内部的致动器使主动压阻悬臂梁发生挠度，这确保了对传感器特性进行可靠和精确的评估。所提出的方法使挠度灵敏度提高了 2.5 倍，与校准程序和分析计算的结果进行了比较。
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