A high-efficiency and high-spectral-resolution EUV/soft X-ray monochromator based on off-plane diffraction.

The most efficient diffraction at a periodic grating structure is expected to take place when the incident radiation can be considered to have been specularly reflected off the inclined part of grooves that are positioned parallel to the trajectory of the incident beam. Very encouraging results for this configuration, in which the diffraction takes place off-plane, have been reported recently for a grating to be used in a spectrometer for space science investigations. This grating provided high efficiency for a relatively large groove density and a large blaze angle. High efficiency was observed even in higher diffraction orders up to the fourth order. Here the performance parameters, especially for the combination of diffraction efficiency and achievable spectral resolution, will be discussed for a grating used in a grazing-incidence plane-grating monochromator for monochromatization of synchrotron radiation in the extreme ultraviolet (EUV) and soft X-ray range with photon energies between 30 eV and 2000 eV. It is found that the instrument can provide competitive spectral resolution in comparison with the use of in-plane diffraction. In the case of comparable spectral resolution, the off-plane diffraction is found to provide superior efficiency.