Huang Ming, Ruoff Rodney S
Center for Multidimensional Carbon Materials (CMCM), Institute for Basic Science (IBS), Ulsan 44919, Republic of Korea.
School of Materials Science and Engineering, Ulsan National Institute of Science and Technology (UNIST), Ulsan 44919, Republic of Korea.
Acc Chem Res. 2020 Apr 21;53(4):800-811. doi: 10.1021/acs.accounts.9b00643. Epub 2020 Mar 24.
ConspectusGraphene, a one-atom-thick layer of carbon with a honeycomb lattice, has drawn great attention due to its outstanding properties and its various applications in electronic and photonic devices. Mechanical exfoliation has been used for preparing graphene flakes (from monolayer to multilayer with thick pieces also typically present), but with sizes limited typically to less than millimeters, its usefulness is limited. Chemical vapor deposition (CVD) has been shown to be the most effective technique for the scalable preparation of graphene films with high quality and uniformity. To date, CVD growth of graphene on the most commonly used substrates (Cu and Ni foils) has been demonstrated and intensively studied. However, a survey of the existing literature and earlier work using Cu or Ni substrates for CVD growth indicates that the bilayer and multilayer graphene over a large area, particularly single crystals, have not been obtained.In this Account, we review current progress and development in the CVD growth of graphene and highlight the important challenges that need to be addressed, for example, how to achieve large single crystal graphene films with a controlled number of layers. A single-layer graphene film grown on polycrystalline Cu foil was first reported by our group, and since then various techniques have been devoted to achieving the fast growth of large-area graphene films with high quality. Commercially available Cu/Ni foils, sputtered Cu/Ni thin films, and polycrystalline Cu/Ni foils have been used for the CVD synthesis of bilayer, trilayer, and multilayer graphene. Cu/Ni alloy substrates are particularly interesting due to their greater carbon solubility than pure Cu substrates and this solubility can be finely controlled by changing the alloy composition. These substrates with controlled compositions have shown the potential for the growth of layer-tunable graphene films in addition to providing a much higher growth rate due to their stronger catalytic activity. However, the well-controlled preparation of single crystal graphene with a defined number of layers on Cu/Ni substrates is still challenging.Due to its small lattice mismatch with graphene, a single crystal Cu(111) foil has been shown to be an ideal substrate for the epitaxial growth of graphene. Our group has reported the synthesis of large-size single crystal Cu(111) foils by the contact-free annealing of commercial Cu foils, and single crystal Cu/Ni(111) alloy foils have also been obtained after the heat-treatment of Ni-coated Cu(111) foils. The use of these single crystal foils (especially the Cu/Ni alloy foils) as growth substrates has enabled the fast growth of single crystal single-layer graphene films. By increase of the Ni content, single crystal bilayer, trilayer, and even multilayer graphene films have been synthesized. In addition, we also discuss the wafer-scale growth of single-layer graphene on the single crystalline Cu/Ni(111) thin films.Recent research results on the large-scale preparation of single crystal graphene films with different numbers of layers on various types of Cu/Ni alloy substrates with different compositions are reviewed and discussed in detail. Despite the remarkable progress in this field, further challenges, such as the wafer-scale synthesis of single crystal graphene with a controlled number of layers and a deeper understanding of the growth mechanism of bilayer and multilayer graphene growth on Cu/Ni substrates, still need to be addressed.
综述
石墨烯是一种具有蜂窝晶格的单原子厚碳层,因其卓越的性能以及在电子和光子器件中的各种应用而备受关注。机械剥离法已被用于制备石墨烯薄片(从单层到多层,通常也存在厚片),但其尺寸通常限制在小于毫米级别,其用途有限。化学气相沉积(CVD)已被证明是可扩展制备高质量、均匀性石墨烯薄膜的最有效技术。迄今为止,已证明并深入研究了在最常用的衬底(铜箔和镍箔)上进行CVD生长石墨烯。然而,对现有文献以及早期使用铜或镍衬底进行CVD生长的工作进行调查表明,尚未获得大面积的双层和多层石墨烯,特别是单晶石墨烯。
在本综述中,我们回顾了石墨烯CVD生长的当前进展和发展,并强调了需要解决的重要挑战,例如如何获得具有可控层数的大尺寸单晶石墨烯薄膜。我们小组首次报道了在多晶铜箔上生长的单层石墨烯薄膜,从那时起,各种技术已致力于实现高质量大面积石墨烯薄膜的快速生长。市售的铜/镍箔、溅射的铜/镍薄膜以及多晶铜/镍箔已用于双层、三层和多层石墨烯的CVD合成。铜/镍合金衬底特别有趣,因为它们比纯铜衬底具有更高的碳溶解度,并且这种溶解度可以通过改变合金成分进行精细控制。这些具有可控成分的衬底除了因其更强的催化活性而提供更高的生长速率外,还显示出用于生长层可调石墨烯薄膜的潜力。然而,在铜/镍衬底上精确控制制备具有确定层数的单晶石墨烯仍然具有挑战性。
由于其与石墨烯的晶格失配小,单晶铜(111)箔已被证明是石墨烯外延生长的理想衬底。我们小组报道了通过商业铜箔的无接触退火合成大尺寸单晶铜(111)箔,并且在镀镍的铜(111)箔热处理后也获得了单晶铜/镍(111)合金箔。使用这些单晶箔(特别是铜/镍合金箔)作为生长衬底能够快速生长单晶单层石墨烯薄膜。通过增加镍含量,已合成了单晶双层、三层甚至多层石墨烯薄膜。此外,我们还讨论了在单晶铜/镍(111)薄膜上进行单层石墨烯的晶圆级生长。
详细回顾和讨论了近期关于在不同成分的各种类型铜/镍合金衬底上大规模制备不同层数单晶石墨烯薄膜的研究结果。尽管该领域取得了显著进展,但仍需解决进一步的挑战,例如具有可控层数的单晶石墨烯的晶圆级合成以及对铜/镍衬底上双层和多层石墨烯生长机制的更深入理解。