通过聚焦离子束（FIB）剥离法与透射电子显微镜（TEM）分析相结合对晶界上的晶间析出物进行平面视图表征：以奥氏体不锈钢为例的研究

Plan-view characterization of intergranular precipitates on grain boundaries by combination of FIB lift out method and TEM analyses: A case study in austenitic stainless steel.

作者信息

Sato Kousei, Kaneko Kenji, Hara Toru, Kawahara Yasuhito, Hamada Jun-Ichi, Takushima Chikako, Teranishi Ryo

机构信息

Department of Materials Science and Engineering, Graduate School of Engineering, Kyushu University, 744 Motooka, Nishi, Fukuoka, Japan.

Research Center for Structural Materials, National Institute for Materials Science, 1-2-1 Sengen, Tsukuba, Ibaraki, Japan.

出版信息

Micron. 2020 Nov;138:102927. doi: 10.1016/j.micron.2020.102927. Epub 2020 Aug 19.

DOI:10.1016/j.micron.2020.102927

PMID:32905976

Abstract

A new characterization method is proposed to study intergranular precipitates of polycrystalline material in the planar manner. A dual beam focused ion beam (FIB) - scanning electron microscopy (SEM) was applied to fabricate thin FIB lamella with a grain boundary parallel to the lamella to investigate for transmission electron microscopy (TEM). Distributions, microstructures and compositions of intergranular precipitates of austenitic stainless steel were then examined by TEM, scanning transmission electron microscopy (STEM), and energy dispersive X-ray spectroscopy (EDS). This plan-view microstructural characterization methods would play important roles in the case of materials where the intergranular precipitates play key roles for their physical and chemical properties.

摘要

提出了一种新的表征方法，以平面方式研究多晶材料的晶界析出物。采用双束聚焦离子束（FIB）-扫描电子显微镜（SEM）制备晶界与薄片平行的FIB薄片，用于透射电子显微镜（TEM）研究。然后通过TEM、扫描透射电子显微镜（STEM）和能量色散X射线光谱（EDS）研究奥氏体不锈钢晶界析出物的分布、微观结构和成分。这种平面微观结构表征方法在晶界析出物对材料物理和化学性质起关键作用的材料研究中具有重要作用。