Liang Jing, Song Zhiqi, Wang Shuya, Zhao Xiaoli, Tong Yanhong, Ren Hang, Guo Shanlei, Tang Qingxin, Liu Yichun
Centre for Advanced Optoelectronic Functional Materials Research, and Key Laboratory of UV-Emitting Materials and Technology of Ministry of Education, Northeast Normal University, 5268 Renmin Street, Changchun 130024, China.
School of Mathematics and Statistics, Wuhan University, Wuhan 430072, China.
ACS Appl Mater Interfaces. 2020 Nov 25;12(47):52992-53002. doi: 10.1021/acsami.0c09821. Epub 2020 Nov 10.
Gas sensors based on polymer field-effect transistors (FETs) have drawn much attention owing to the inherent merits of specific selectivity, low cost, and room temperature operation. Ultrathin (<10 nm) and porous polymer semiconductor films offer a golden opportunity for achieving high-performance gas sensors. However, wafer-scale fabrication of such high-quality polymer films is of great challenge and has rarely been realized before. Herein, the first demonstration of 4 in. wafer-scale, cobweb-like, and ultrathin porous polymer films is reported via a one-step phase-inversion process. This approach is extremely simple and universal for constructing various ultrathin porous polymer semiconductor films. Thanks to the abundant pores, ultrathin size, and high charge-transfer efficiency of the prepared polymer films, our gas sensors exhibit many superior advantages, including ultrahigh response (2.46 × 10%), low limit of detection (LOD) (<1 ppm), and excellent selectivity. Thus, the proposed fabrication strategy is exceptionally promising for mass manufacturing of low-cost high-performance polymer FET-based gas sensors.
基于聚合物场效应晶体管(FET)的气体传感器因其具有特定选择性、低成本和室温操作等固有优点而备受关注。超薄(<10 nm)且多孔的聚合物半导体薄膜为实现高性能气体传感器提供了绝佳机会。然而,这种高质量聚合物薄膜的晶圆级制造极具挑战性,此前很少有人实现。在此,通过一步相转化工艺首次报道了4英寸晶圆级、蛛网状且超薄的多孔聚合物薄膜。这种方法对于构建各种超薄多孔聚合物半导体薄膜极其简单且通用。得益于所制备聚合物薄膜丰富的孔隙、超薄尺寸和高电荷转移效率,我们的气体传感器展现出许多卓越优势,包括超高响应(2.46×10%)、低检测限(LOD)(<1 ppm)和出色的选择性。因此,所提出的制造策略对于低成本高性能聚合物FET基气体传感器的大规模制造极具前景。