Oh Hongseok, Yi Gyu-Chul, Yip Michael, Dayeh Shadi A
Integrated Electronics and Biointerfaces Laboratory, Department of Electrical and Computer Engineering, University of California San Diego, La Jolla, CA 92093, USA.
Department of Physics and Astronomy, Institute of Applied Physics, and Research Institute of Advanced Materials (RIAM), Seoul National University, Seoul 08826, Korea.
Sci Adv. 2020 Nov 13;6(46). doi: 10.1126/sciadv.abd7795. Print 2020 Nov.
We report large-scale and multiplexed tactile sensors with submillimeter-scale shear sensation and autonomous and real-time closed-loop grip adjustment. We leveraged dual-gate piezoelectric zinc oxide (ZnO) thin-film transistors (TFTs) fabricated on flexible substrates to record normal and shear forces with high sensitivity over a broad range of forces. An individual ZnO TFT can intrinsically sense, amplify, and multiplex force signals, allowing ease of scalability for multiplexing from hundreds of elements with 100-μm spatial and sub-10-ms temporal resolutions. Notably, exclusive feedback from the tactile sensor array enabled rapid adjustment of grip force to slip, enabling the direct autonomous robotic tactile perception with a single modality. For biomedical and implantable device applications, pulse sensing and underwater flow detection were demonstrated. This robust technology, with its reproducible and reliable performance, can be immediately translated for use in industrial and surgical robotics, neuroprosthetics, implantables, and beyond.
我们报道了具有亚毫米级剪切感测以及自主实时闭环抓握调整功能的大规模复用触觉传感器。我们利用在柔性基板上制造的双栅压电氧化锌（ZnO）薄膜晶体管（TFT），在很宽的力范围内以高灵敏度记录法向力和剪切力。单个ZnO TFT能够内在地感测、放大和复用力信号，便于从数百个元件进行复用扩展，具有100μm的空间分辨率和低于10ms的时间分辨率。值得注意的是，触觉传感器阵列的专属反馈能够使抓握力迅速根据滑动情况进行调整，从而实现单一模态的直接自主机器人触觉感知。对于生物医学和可植入设备应用，展示了脉搏感测和水下流量检测。这项强大的技术具有可重复和可靠的性能，可立即转化用于工业和手术机器人、神经假体、可植入设备等领域。
