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用于在4英寸尺度上制备单向和垂直取向的亚10纳米嵌段共聚物图案的剪切轧制工艺。

Shear-Rolling Process for Unidirectionally and Perpendicularly Oriented Sub-10-nm Block Copolymer Patterns on the 4 in Scale.

作者信息

Oh Jinwoo, Shin Minkyung, Kim In Soo, Suh Hyo Seon, Kim YongJoo, Kim Jai Kyeong, Bang Joona, Yeom Bongjun, Son Jeong Gon

机构信息

Soft Hybrid Materials Research Center, Korea Institute of Science and Technology, Seoul 02792, Republic of Korea.

Department of Chemical Engineering, Hanyang University, Seoul 04763, Republic of Korea.

出版信息

ACS Nano. 2021 May 25;15(5):8549-8558. doi: 10.1021/acsnano.1c00358. Epub 2021 May 12.

Abstract

Shear alignment of the block copolymer (BCP) thin film is one of the promising directed self-assembly (DSA) methodologies for the unidirectional alignment of sub-10 nm microdomains of BCPs for next-generation nanolithography and nanowire-grid polarizers. However, because of the differences in the surface/interfacial energies at the top surface/bottom interface, the shear-induced ordering of BCP nanopatterns has been restricted to BCPs with spherical and cylindrical nanopatterns and cannot be realized for high-aspect-ratio perpendicular lamellar structures, which is essential for practical application to semiconductor pattern processes. It is still a difficult challenge to fabricate the unidirectional alignment in a short time over a large area. In this study, we propose an approach for combining the shear-rolling process with the filtered plasma treatment of BCP films for the fabrication of unidirectionally aligned and perpendicularly oriented lamellar nanostructures. This approach enables fabrication within 1 min on a 4 in scale. We treated filtered plasma on the BCP film for perpendicular orientation and executed the hot-rolling process with different roller and stage speeds. Large-scale shear was generated only at the location where the BCP film was in contact with both the roller and stage, effectively applying shear stress to a large area of the BCP film within a short time. The repeated application of this shear-rolling process can achieve a higher level of unidirectional alignment. Our aligned BCP vertical lamellae were used to fabricate a high-aspect-ratio sub-10-nm-wide metallic nanowire array dry/wet processes. In addition, shear-rolling with chemoepitaxy patterns can achieve higher orientational order and lower defectivity.

摘要

嵌段共聚物(BCP)薄膜的剪切取向是一种很有前景的定向自组装(DSA)方法,可用于将BCP的亚10纳米微区进行单向排列,以用于下一代纳米光刻和纳米线栅偏振器。然而,由于顶表面/底界面处的表面/界面能存在差异,BCP纳米图案的剪切诱导有序排列仅限于具有球形和圆柱形纳米图案的BCP,对于高纵横比的垂直层状结构则无法实现,而这种结构对于半导体图案工艺的实际应用至关重要。在短时间内在大面积上制造单向排列仍然是一项艰巨的挑战。在本研究中,我们提出了一种将剪切滚压工艺与BCP薄膜的过滤等离子体处理相结合的方法,用于制造单向排列且垂直取向的层状纳米结构。这种方法能够在4英寸规模上在1分钟内完成制造。我们对BCP薄膜进行过滤等离子体处理以实现垂直取向,并以不同的滚筒和平台速度执行热轧工艺。仅在BCP薄膜与滚筒和平台都接触的位置产生大规模剪切,从而在短时间内有效地对大面积的BCP薄膜施加剪切应力。重复应用这种剪切滚压工艺可以实现更高水平的单向排列。我们排列的BCP垂直薄片用于通过干法/湿法工艺制造高纵横比的亚10纳米宽金属纳米线阵列。此外,具有化学外延图案的剪切滚压可以实现更高的取向有序度和更低的缺陷率。

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