Sumpf Bernd, Theurer Lara Sophie, Maiwald Martin, Müller André, Maaßdorf André, Fricke Jörg, Ressel Peter, Tränkle Günther
Appl Opt. 2021 Jun 20;60(18):5418-5423. doi: 10.1364/AO.422688.
Wavelength stabilized distributed Bragg reflector (DBR) tapered diode lasers at 783 nm will be presented. The devices are based on GaAsP single quantum wells embedded in a large optical cavity leading to a vertical far field angle of about 29° (full width at half maximum). The 3-inch (7.62 cm) wafers are grown using metalorganic vapor phase epitaxy. In a full wafer process, 4 mm long DBR tapered lasers are manufactured. The devices consist of a 500 µm long 10th order surface DBR grating that acts as rear side mirror. After that, a 1 mm long ridge waveguide section is realized for lateral confinement, which is connected to a 2.5 mm long flared section having a full taper angle of 6°. At an injection current of 8 A, a maximum output power of about 7 W is measured. At output powers up to 6 W, the measured emission width limited by the resolution of the spectrometer is smaller than 19 pm. Measured at 1/ level at this output power, the lateral beam waist width is 11.5 µm, the lateral far field angle 12.5°, and the lateral beam parameter 2.5. The respective parameters measured using the second moments are 31 µm, 15.2°, and 8.3. 70% of the emitted power is originated from the central lobe.
将介绍波长稳定的783nm分布布拉格反射器(DBR)锥形二极管激光器。这些器件基于嵌入大光学腔中的GaAsP单量子阱,垂直远场角约为29°(半高全宽)。3英寸(7.62厘米)的晶圆采用金属有机气相外延生长。在完整的晶圆工艺中,制造出4毫米长的DBR锥形激光器。这些器件由一个500微米长的十阶表面DBR光栅组成,用作后侧镜。之后,实现一个1毫米长的脊形波导段用于横向限制,该段连接到一个2.5毫米长、全锥角为6°的扩口段。在8A的注入电流下,测得的最大输出功率约为7W。在输出功率高达6W时,由光谱仪分辨率限制测得的发射宽度小于19pm。在此输出功率下,在1/电平测量时,横向束腰宽度为11.5微米,横向远场角为12.5°,横向光束参数为2.5。使用二阶矩测量的相应参数分别为31微米、15.2°和8.3。70%的发射功率来自中心瓣。