Dulmaa Altangerel, Depla Diederik
Department of Solid State Sciences, Ghent University, Krijgslaan 281 (S1), 9000 Gent, Belgium.
Materials (Basel). 2021 Nov 26;14(23):7224. doi: 10.3390/ma14237224.
CuO and Al thin films were successively deposited using direct current (reactive) magnetron sputter deposition. A multilayer of five bilayers was deposited on glass, which can be ignited by heating a Ti resistive thin film. The velocity of the reaction front which propagates along the multilayer was optically determined using a high-speed camera. During the deposition of the aluminum layers, air was intentionally leaked into the vacuum chamber to introduce impurities in the film. Depositions at different impurity/metal flux ratios were performed. The front velocity reaches a value of approximately 20 m/s at low flux ratios but drops to approximately 7 m/s at flux ratios between 0.6 and 1. The drop is rather abrupt as the front velocity stays constant above flux ratios larger than 1. This behavior is explained based on the hindrance of the oxygen transport from the oxidizer (CuO) to the fuel (Al).
采用直流(反应性)磁控溅射沉积法依次沉积了氧化铜(CuO)薄膜和铝(Al)薄膜。在玻璃上沉积了由五层双层结构组成的多层膜,该多层膜可通过加热钛电阻薄膜来点燃。利用高速摄像机通过光学方法测定了沿多层膜传播的反应前沿速度。在铝层沉积过程中,故意将空气泄漏到真空室中,以便在薄膜中引入杂质。进行了不同杂质/金属通量比的沉积实验。在低通量比下,前沿速度达到约20米/秒的值,但在通量比介于0.6和1之间时降至约7米/秒。当通量比大于1时,前沿速度保持恒定,因此这种下降相当突然。基于从氧化剂(CuO)到燃料(Al)的氧传输受阻来解释这种行为。