Mohd Said Nor Damsyik, Sahdan Mohd Zainizan, Nayan Nafarizal, Saim Hashim, Adriyanto Feri, Bakri Anis Suhaili, Morsin Marlia
Microelectronics and Nanotechnology - Shamsuddin Research Centre (MiNT-SRC), Universiti Tun Hussein Onn Malaysia (UTHM) 86400 Batu Pahat Johor Malaysia
Electrical Engineering Department, Politeknik Kota Kinabalu No. 4, Jln Politeknik, KKIP Barat, Kota Kinabalu Industrial Park 88460 Kota Kinabalu Sabah Malaysia
RSC Adv. 2018 Aug 22;8(52):29686-29697. doi: 10.1039/c8ra03950j. eCollection 2018 Aug 20.
In this research, pure titanium dioxide (TiO) and doped TiO thin film layers were prepared using the spin coating method of titanium(iv) butoxide on a glass substrate from the sol-gel method and annealed at 500 °C. The effects on the structural and chemical properties of these thin films were then investigated. The metal doped TiO thin film which exists as trivalent electrons consists of aluminium (Al), yttrium (Y) and gadolinium (Gd). The anatase phase of the thin films was observed and it was found that the crystal size became smaller when the concentration of thin film increased. The grain size was found to be 0.487 to 13.925 nm. The types of surface morphologies of the thin films were nanoporous, with a little agglomeration and smaller nanoparticles corresponding to Al doped TiO, Y doped TiO and Gd doped TiO, respectively. The trivalent doping concentration of the thin films increased with a rising of thickness of the thin film. This can contribute to the defects that give advantages to the thin film when the mobility of the hole carriers is high and the electrons of Ti can move easily. Thus, Ti existed as a defect state in the metal doped TiO thin film based on lattice distortion with a faster growth thin film that encouraged the formation of a higher level of oxygen vacancy defects.
在本研究中,采用溶胶 - 凝胶法将钛酸丁酯旋涂在玻璃基板上制备纯二氧化钛(TiO₂)和掺杂TiO₂薄膜层,并在500℃下退火。然后研究了这些薄膜对结构和化学性质的影响。以三价电子形式存在的金属掺杂TiO₂薄膜由铝(Al)、钇(Y)和钆(Gd)组成。观察到薄膜的锐钛矿相,并且发现当薄膜浓度增加时晶体尺寸变小。发现晶粒尺寸为0.487至13.925纳米。薄膜的表面形态类型为纳米多孔,分别对应于Al掺杂TiO₂、Y掺杂TiO₂和Gd掺杂TiO₂,有少量团聚且纳米颗粒较小。薄膜的三价掺杂浓度随着薄膜厚度的增加而增加。当空穴载流子迁移率高且Ti的电子能够容易移动时,这会导致产生有利于薄膜的缺陷。因此,基于晶格畸变,Ti在金属掺杂TiO₂薄膜中以缺陷态存在,薄膜生长较快,促使形成更高水平的氧空位缺陷。