Wu Qiang, Li Xue, Wang Xuming, Yuan Yubin, Bu Xiangrui, Wu Haiyang, Li Xin, Han Chuanyu, Wang XiaoLi, Liu Weihua
Department of Microelectronics, School of Electronics and Information Engineering, Xi'an Jiaotong University, Xi'an, 710049, People's Republic of China.
The Key Lab of Micro-Nano Electronics and System Integration of Xi'an City, Xi'an 710049, People's Republic of China.
Nanotechnology. 2022 Jun 20;33(37). doi: 10.1088/1361-6528/ac7242.
A delay line-type surface acoustic wave (SAW) gas sensor based on p-hexafluoroisopropanol phenyl (HFIPPH) functionalized multi-walled carbon nanotube (MWCNT) film is developed to detect organophosphorus dimethyl methylphosphonate (DMMP) vapor (a simulant of chemical nerve agent sarin). Inspired by the transfer process of Cu-based graphene, a uniform and size-controllable HFIPPH-MWCNT film is successfully prepared on the SAW device via a wet-etching transfer method. For the first time, we use the method of measuring the change of the sensor's insertion loss to achieve the detection of ultra-low concentration DMMP vapor. The designed sensor exhibits a fast response/recovery time about 3 s/50 s, and a low detection limit of 0.1 ppm. Additionally, the stability and selectivity of the sensor and the influence of humidity on its response are evaluated through experiments. The acoustoelectric effect is proved to be the sensing mechanism of the sensor insertion loss response.
基于对六氟异丙醇苯基(HFIPPH)功能化多壁碳纳米管(MWCNT)薄膜的延迟线型表面声波(SAW)气体传感器被开发用于检测有机磷甲基膦酸二甲酯(DMMP)蒸气(化学神经毒剂沙林的模拟物)。受基于铜的石墨烯转移过程的启发,通过湿蚀刻转移方法在SAW器件上成功制备了均匀且尺寸可控的HFIPPH-MWCNT薄膜。首次使用测量传感器插入损耗变化的方法来实现对超低浓度DMMP蒸气的检测。所设计的传感器表现出约3 s/50 s的快速响应/恢复时间以及0.1 ppm的低检测限。此外,通过实验评估了传感器的稳定性、选择性以及湿度对其响应的影响。声电效应被证明是传感器插入损耗响应的传感机制。