Mamun Abdulla Al, Zhao Feng
Micro/Nanoelectronics and Energy Laboratory, School of Engineering and Computer Science, Washington State University, Vancouver, WA 98686, USA.
Micromachines (Basel). 2022 Apr 20;13(5):657. doi: 10.3390/mi13050657.
Microneedles are getting more and more attention in research and commercialization since their advancement in the 1990s due to the advantages over traditional hypodermic needles such as minimum invasiveness, low material and fabrication cost, and precise needle geometry control, etc. The design and fabrication of microneedles depend on various factors such as the type of materials used, fabrication planes and techniques, needle structures, etc. In the past years, in-plane and out-of-plane microneedle technologies made by silicon (Si), polymer, metal, and other materials have been developed for numerous biomedical applications including drug delivery, sample collections, medical diagnostics, and bio-sensing. Among these microneedle technologies, in-plane Si microneedles excel by the inherent properties of Si such as mechanical strength, wear resistance, biocompatibility, and structural advantages of in-plane configuration such as a wide range of length, readiness of integration with other supporting components, and complementary metal-oxide-semiconductor (CMOS) compatible fabrication. This article aims to provide a review of in-plane Si microneedles with a focus on fabrication techniques, theoretical and numerical analysis, experimental characterization of structural and fluidic behaviors, major applications, potential challenges, and future prospects.
自20世纪90年代微针取得进展以来，因其相较于传统皮下注射针具有诸多优势，如微创性、低材料和制造成本以及精确的针几何形状控制等，微针在研究和商业化方面越来越受到关注。微针的设计和制造取决于多种因素，如所用材料的类型、制造平面和技术、针结构等。在过去几年中，由硅（Si）、聚合物、金属和其他材料制成的平面内和平面外微针技术已被开发用于众多生物医学应用，包括药物递送、样本采集、医学诊断和生物传感。在这些微针技术中，平面内硅微针凭借硅的固有特性（如机械强度、耐磨性、生物相容性）以及平面内配置的结构优势（如长度范围广、易于与其他支撑部件集成以及与互补金属氧化物半导体（CMOS）兼容制造）而脱颖而出。本文旨在对平面内硅微针进行综述，重点关注制造技术、理论和数值分析、结构和流体行为的实验表征、主要应用、潜在挑战以及未来前景。
