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一种超微量粘合剂转移方法及其在飞升至皮升水平粘合剂分布中的应用。

An Ultra-Micro-Volume Adhesive Transfer Method and Its Application in fL-pL-Level Adhesive Distribution.

作者信息

Liu Huifang, Chen Xi, Wang Shuqing, Jiang Shenhui, Chen Ying, Li Fuxuan

机构信息

School of Mechanical Engineering, Shenyang University of Technology, Shenyang 110870, China.

Shenyang Machine Tool (Group) Co., Ltd., Shenyang 110142, China.

出版信息

Micromachines (Basel). 2022 Apr 23;13(5):664. doi: 10.3390/mi13050664.

DOI:10.3390/mi13050664
PMID:35630131
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC9144636/
Abstract

This study is aimed at addressing the urgent demand for ultra-micro-precision dispensing technology in high-performance micro- and nanometer encapsulation, connection, and assembly manufacturing, considering the great influence of colloid viscosity and surface tension on the dispensing process in micro- and nanometer scale. According to the principle of liquid transfer, a method of adhesive transfer that can realize fL-pL levels is studied in this paper. A mathematical model describing the initial droplet volume and the transfer droplet volume was established, and the factors affecting the transfer process of adhesive were analyzed by the model. The theoretical model of the transfer droplet volume was verified by a 3D scanning method. The relationships between the transfer droplet volume and the initial droplet volume, stay time, initial distance, and stretching speed were systematically analyzed by a single-factor experiment, and the adhesive transfer rate was calculated. Combined with trajectory planning, continuous automatic dispensing experiments with different patterns were developed, and the problems of the transfer droplet size, appearance quality, and position accuracy were analyzed comprehensively. The results show that the average relative deviation of the transfer droplet lattice position obtained by the dispensing method in this paper was 6.2%. The minimum radius of the transfer droplet was 11.7 μm, and the minimum volume of the transfer droplet was 573.3 fL. Furthermore, microporous encapsulation was realized using the method of ultra-micro-dispensing.

摘要

考虑到胶体粘度和表面张力对微米和纳米尺度下点胶过程的重大影响，本研究旨在满足高性能微米和纳米封装、连接及装配制造中对超微精密点胶技术的迫切需求。根据液体转移原理，本文研究了一种可实现飞升至皮升量级的胶粘剂转移方法。建立了描述初始液滴体积和转移液滴体积的数学模型，并通过该模型分析了影响胶粘剂转移过程的因素。采用三维扫描方法对转移液滴体积的理论模型进行了验证。通过单因素实验系统分析了转移液滴体积与初始液滴体积、停留时间、初始距离和拉伸速度之间的关系，并计算了胶粘剂转移率。结合轨迹规划，开展了不同图案的连续自动点胶实验，全面分析了转移液滴尺寸、外观质量和位置精度等问题。结果表明，本文点胶方法获得的转移液滴点阵位置的平均相对偏差为6.2%。转移液滴的最小半径为11.7μm，最小体积为573.3fL。此外，利用超微点胶方法实现了微孔封装。

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