Department of Electrical and Computer Engineering, Inter-University Semiconductor Research Center (ISRC), Seoul National University, Seoul 08826, Korea.
Soft Hybrid Materials Research Center, Korea Institute of Science and Technology, Seoul 02792, Korea.
Mater Horiz. 2022 Aug 1;9(8):2053-2075. doi: 10.1039/d2mh00470d.
Strain-engineered elastic platforms that can efficiently distribute mechanical stress under deformation offer adjustable mechanical compliance for stretchable electronic systems. By fully exploiting strain-free regions that are favourable for fabricating thin-film devices and interconnecting with reliably stretchable conductors, various electronic systems can be integrated onto stretchable platforms with the assistance of strain engineering strategies. Over the last decade, applications of multifunctional stretchable thin-film devices simultaneously exhibiting superior electrical and mechanical performance have been demonstrated, shedding light on the realization of further reliable human-machine interfaces. This review highlights recent developments in enabling technologies for strain-engineered elastic platforms. In particular, representative approaches to realize strain-engineered substrates and stretchable interconnects in island-bridge configurations are introduced from the perspective of the material homogeneity and structural design of the substrate. State-of-the-art achievements in sophisticated stretchable electronic devices on strain-engineered elastic platforms are also presented, such as stretchable sensors, energy devices, thin-film transistors, and displays, and then, the challenges and outlook are discussed.
应变工程弹性平台在变形时可有效地分配机械应力,为可拉伸电子系统提供可调节的机械顺应性。通过充分利用有利于制造薄膜器件和与可靠的可拉伸导体互连的无应变区域,各种电子系统可以在应变工程策略的帮助下集成到可拉伸平台上。在过去的十年中,展示了同时具有优异电性能和机械性能的多功能可拉伸薄膜器件的应用,为进一步实现可靠的人机界面提供了思路。本文重点介绍了应变工程弹性平台的相关使能技术的最新进展。特别是,从衬底的材料均匀性和结构设计的角度出发,介绍了实现应变工程衬底和可拉伸互连的代表性方法。还介绍了在应变工程弹性平台上的复杂可拉伸电子器件的最新进展,例如可拉伸传感器、能量器件、薄膜晶体管和显示器,然后讨论了挑战和展望。