School of Chemical and Biomolecular Engineering, The University of Sydney, Sydney, NSW, 2006, Australia.
The University of Sydney Nano Institute, The University of Sydney, Sydney, NSW, 2006, Australia.
Sci Rep. 2023 Jan 5;13(1):198. doi: 10.1038/s41598-022-26232-9.
AlCrFeCoNiCu thin films were fabricated by cathodic arc deposition under different substrate biases. Detailed characterization of the chemistry and structure of the film, from the substrate interface to the film surface, was achieved by combining high-resolution transmission electron microscopy, X-ray photoelectron spectroscopy, and atomic force microscopy. Computer simulations using the transport of ions in matter model were applied to understand the ion surface interactions that revealed the key mechanism of the film growth. The final compositions of the films are significantly different from that of the target used. A trend of elemental segregation, which was more pronounced with higher ion kinetic energy, was observed. The XPS results reveal the formation of [Formula: see text] and [Formula: see text] on the thin film surface. The grain size is shown to increase with the increasing of the ion kinetic energy. The growth of equiaxed grains contributed to the formation of a flat surface with a relatively low surface roughness as shown by atomic force microscopy.
采用直流磁控溅射法在不同衬底偏压下制备了 AlCrFeCoNiCu 薄膜。通过高分辨率透射电子显微镜、X 射线光电子能谱和原子力显微镜相结合，对从衬底界面到薄膜表面的薄膜化学和结构进行了详细的表征。利用物质输运离子模型进行计算机模拟，以了解离子表面相互作用，揭示了薄膜生长的关键机制。薄膜的最终成分与使用的靶材有很大的不同。观察到元素偏析的趋势，随着离子动能的增加，这种趋势更加明显。XPS 结果表明，在薄膜表面形成了[公式：见文本]和[公式：见文本]。结果表明，晶粒尺寸随离子动能的增加而增大。等轴晶粒的生长有助于形成一个相对低表面粗糙度的平面，原子力显微镜显示。
