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基于窄带微波光子滤波器的高分辨率硅光子传感器。

High-resolution silicon photonic sensor based on a narrowband microwave photonic filter.

作者信息

Luo Haiyan, Xu Lu, Yan Jie, Wang Qiansheng, Wang Wenwu, Xiao Xi

机构信息

Institute of Microelectronics, Chinese Academy of Sciences, Beijing, 100029, China.

University of Chinese Academy of Sciences, Beijing, 100049, China.

出版信息

Front Optoelectron. 2023 Mar 27;16(1):4. doi: 10.1007/s12200-023-00059-2.

DOI:10.1007/s12200-023-00059-2
PMID:36971907
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC10043093/
Abstract

Microwave photonic sensors are promising for improving sensing resolution and speed of optical sensors. In this paper, a high-sensitivity, high-resolution temperature sensor based on microwave photonic filter (MPF) is proposed and demonstrated. A micro-ring resonator (MRR) based on silicon-on-insulator is used as the sensing probe to convert the wavelength shift caused by temperature change to microwave frequency variation via the MPF system. By analyzing the frequency shift with high-speed and high-resolution monitors, the temperature change can be detected. The MRR is designed with multi-mode ridge waveguides to reduce propagation loss and achieves an ultra-high Q factor of 1.01 × 10. The proposed MPF has a single passband with a narrow bandwidth of 192 MHz. With clear peak-frequency shift, the sensitivity of the MPF-based temperature sensor is measured to be 10.22 GHz/°C. Due to higher sensitivity and ultra-narrow bandwidth of the MPF, the sensing resolution of the proposed temperature sensor is as high as 0.019 °C.

摘要

微波光子传感器有望提高光学传感器的传感分辨率和速度。本文提出并演示了一种基于微波光子滤波器（MPF）的高灵敏度、高分辨率温度传感器。基于绝缘体上硅的微环谐振器（MRR）用作传感探头，通过MPF系统将温度变化引起的波长偏移转换为微波频率变化。通过使用高速和高分辨率监测器分析频率偏移，可以检测到温度变化。MRR采用多模脊形波导设计以降低传播损耗，并实现了1.01×10的超高品质因数。所提出的MPF具有单个通带，带宽为192MHz，带宽较窄。由于具有清晰的峰值频率偏移，基于MPF的温度传感器的灵敏度测得为10.22GHz/°C。由于MPF具有更高的灵敏度和超窄带宽，所提出的温度传感器的传感分辨率高达0.019°C。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/187c/10043093/5a5c3e3d7f2a/12200_2023_59_Fig7_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/187c/10043093/f77a67f9d934/12200_2023_59_Fig1_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/187c/10043093/646f4d11a54a/12200_2023_59_Fig2_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/187c/10043093/47d69e9dbeab/12200_2023_59_Fig3_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/187c/10043093/b448a6ab9f77/12200_2023_59_Fig4_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/187c/10043093/3134a680e45e/12200_2023_59_Fig5_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/187c/10043093/8dee43989108/12200_2023_59_Fig6_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/187c/10043093/5a5c3e3d7f2a/12200_2023_59_Fig7_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/187c/10043093/f77a67f9d934/12200_2023_59_Fig1_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/187c/10043093/646f4d11a54a/12200_2023_59_Fig2_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/187c/10043093/47d69e9dbeab/12200_2023_59_Fig3_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/187c/10043093/b448a6ab9f77/12200_2023_59_Fig4_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/187c/10043093/3134a680e45e/12200_2023_59_Fig5_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/187c/10043093/8dee43989108/12200_2023_59_Fig6_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/187c/10043093/5a5c3e3d7f2a/12200_2023_59_Fig7_HTML.jpg

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2
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Sensors (Basel). 2020 Apr 9;20(7):2113. doi: 10.3390/s20072113.
3
High-precision strain-insensitive temperature sensor based on an optoelectronic oscillator.基于光电振荡器的高精度应变不敏感温度传感器。
Opt Express. 2019 Dec 23;27(26):37532-37540. doi: 10.1364/OE.27.037532.
4
Double-pass microwave photonic sensing system based on low-coherence interferometry.基于低相干干涉的双路微波光子传感系统。
Opt Lett. 2019 Apr 1;44(7):1662-1665. doi: 10.1364/OL.44.001662.
5
Temperature-insensitive waveguide sensor using a ring cascaded with a Mach-Zehnder interferometer.使用环形结构级联马赫-曾德尔干涉仪的温度不敏感波导传感器。
Opt Lett. 2019 Jan 15;44(2):299-302. doi: 10.1364/OL.44.000299.
6
Sensitivity enhanced fiber sensor based on a fiber ring microwave photonic filter with the Vernier effect.基于具有游标效应的光纤环形微波光子滤波器的灵敏度增强型光纤传感器。
Opt Express. 2017 Sep 4;25(18):21559-21566. doi: 10.1364/OE.25.021559.
7
Demodulation of an optical fiber MEMS pressure sensor based on single bandpass microwave photonic filter.基于单带通微波光子滤波器的光纤微机电系统压力传感器解调
Opt Express. 2017 Jan 23;25(2):644-653. doi: 10.1364/OE.25.000644.
8
A Novel Optical Fiber Sensor for Steel Corrosion in Concrete Structures.一种用于混凝土结构中钢筋腐蚀的新型光纤传感器。
Sensors (Basel). 2008 Mar 20;8(3):1960-1976. doi: 10.3390/s8031960.
9
Cascaded ring resonator-based temperature sensor with simultaneously enhanced sensitivity and range.基于级联环形谐振器的温度传感器，具有同时增强的灵敏度和量程。
Opt Express. 2016 May 2;24(9):9501-10. doi: 10.1364/OE.24.009501.
10
Long fiber Bragg grating sensor interrogation using discrete-time microwave photonic filtering techniques.采用离散时间微波光子滤波技术的长光纤布拉格光栅传感器询问
Opt Express. 2013 Nov 18;21(23):28175-81. doi: 10.1364/OE.21.028175.