基于裂缝的微结构传感器用于应变和压力传感。

Crack-Based Sensor with Microstructures for Strain and Pressure Sensing.

机构信息

Division of Mechanical Convergence Engineering, College of MICT Convergence Engineering, Silla University, Busan 46958, Republic of Korea.

Department of Mechanical Engineering, Chungnam National University, Daejeon 34134, Republic of Korea.

出版信息

Sensors (Basel). 2023 Jun 13;23(12):5545. doi: 10.3390/s23125545.

DOI:10.3390/s23125545

PMID:37420710

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC10301158/

Abstract

Recent extensive research on flexible electronics has led to the development of various flexible sensors. In particular, sensors inspired by the slit organs of a spider, which utilize cracks in a metal film to measure strain, have garnered considerable interest. This method exhibited significantly high sensitivity, repeatability, and durability in measuring strain. In this study, a thin-film crack sensor was developed using a microstructure. The results exhibited its ability to simultaneously measure the tensile force and pressure in a thin film, further expanding its applications. Furthermore, the strain and pressure characteristics of the sensor were measured and analyzed using an FEM simulation. The proposed method is expected to contribute to the future development of wearable sensors and artificial electronic skin research.

摘要

近年来，对柔性电子产品的广泛研究导致了各种柔性传感器的发展。特别是受蜘蛛缝隙器官启发的传感器，利用金属膜中的裂缝来测量应变，引起了相当大的兴趣。这种方法在测量应变时表现出非常高的灵敏度、重复性和耐用性。在这项研究中，使用微结构开发了一种薄膜裂缝传感器。结果表明，它能够同时测量薄膜中的拉力和压力，进一步扩大了其应用范围。此外，还使用有限元模拟（FEM）对传感器的应变和压力特性进行了测量和分析。预计该方法将有助于未来可穿戴传感器和人工电子皮肤研究的发展。