Lim Dong-Wook, Kim Myeongjun, Choi Philgong, Yoon Sung-June, Lee Hyun-Taek, Kim Kyunghan
Department of Mechanical Engineering, Inha University, Incheon 22212, Republic of Korea.
Department of Mechanical Engineering, Chungnam University, Daejeon 34134, Republic of Korea.
Micromachines (Basel). 2023 Mar 27;14(4):743. doi: 10.3390/mi14040743.
In high-aspect ratio laser drilling, many laser and optical parameters can be controlled, including the high-laser beam fluence and number of drilling process cycles. Measurement of the drilled hole depth is occasionally difficult or time consuming, especially during machining processes. This study aimed to estimate the drilled hole depth in high-aspect ratio laser drilling by using captured two-dimensional (2D) hole images. The measuring conditions included light brightness, light exposure time, and gamma value. In this study, a method for predicting the depth of a machined hole by using a deep learning methodology was devised. Adjusting the laser power and the number of processing cycles for blind hole generation and image analysis yielded optimal conditions. Furthermore, to forecast the form of the machined hole, we identified the best circumstances based on changes in the exposure duration and gamma value of the microscope, which is a 2D image measurement instrument. After extracting the data frame by detecting the contrast data of the hole by using an interferometer, the hole depth was predicted using a deep neural network with a precision of within 5 μm for a hole within 100 μm.
在高纵横比激光钻孔中,可以控制许多激光和光学参数,包括高激光束能量密度和钻孔工艺循环次数。测量钻孔深度有时很困难或耗时,尤其是在加工过程中。本研究旨在通过使用捕获的二维(2D)孔图像来估计高纵横比激光钻孔中的钻孔深度。测量条件包括光亮度、曝光时间和伽马值。在本研究中,设计了一种使用深度学习方法预测加工孔深度的方法。调整激光功率和用于盲孔生成及图像分析的加工循环次数产生了最佳条件。此外,为了预测加工孔的形状,我们根据作为二维图像测量仪器的显微镜的曝光持续时间和伽马值的变化确定了最佳情况。通过使用干涉仪检测孔的对比度数据提取数据帧后,使用深度神经网络预测孔深度,对于100μm以内的孔,精度在5μm以内。