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用于矢量水听器的高灵敏度压电微机电系统加速度计

High-Sensitivity Piezoelectric MEMS Accelerometer for Vector Hydrophones.

作者信息

Shi Shuzheng, Ma Liyong, Kang Kai, Zhu Jie, Hu Jinjiang, Ma Hong, Pang Yongjun, Wang Zhanying

机构信息

School of Mechanical Engineering, Hebei University of Architecture, Zhangjiakou 075000, China.

HBIS Group Co., Ltd., Shijiazhuang 050023, China.

出版信息

Micromachines (Basel). 2023 Aug 14;14(8):1598. doi: 10.3390/mi14081598.

DOI:10.3390/mi14081598
PMID:37630134
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC10456523/
Abstract

In response to the growing demand for high-sensitivity accelerometers in vector hydrophones, a piezoelectric MEMS accelerometer (PMA) was proposed, which has a four-cantilever beam integrated inertial mass unit structure, with the advantages of being lightweight and highly sensitive. A theoretical energy harvesting model was established for the piezoelectric cantilever beam, and the geometric dimensions and structure of the microdevice were optimized to meet the vibration pickup conditions. The sol-gel and annealing technology was employed to prepare high-quality PZT thin films on silicon substrate, and accelerometer microdevices were manufactured by using MEMS technology. Furthermore, the MEMS accelerometer was packaged for testing on a vibration measuring platform. Test results show that the PMA has a resonant frequency of 2300 Hz. In addition, there is a good linear relationship between the input acceleration and the output voltage, with = 8.412 - 0.212. The PMA not only has high sensitivity, but also has outstanding anti-interference ability. The accelerometer structure was integrated into a vector hydrophone for testing in a calibration system. The results show that the piezoelectric vector hydrophone (PVH) has a sensitivity of -178.99 dB@1000 Hz (0 dB = 1 V/μPa) and a bandwidth of 20~1100 Hz. Meanwhile, it exhibits a good "8" shape directivity and consistency of each channel. These results demonstrate that the piezoelectric MEMS accelerometer has excellent capabilities suitable for use in vector hydrophones.

摘要

针对矢量水听器中对高灵敏度加速度计不断增长的需求，提出了一种具有四悬臂梁集成惯性质量单元结构的压电微机电系统加速度计（PMA），其具有轻质和高灵敏度的优点。建立了压电悬臂梁的理论能量收集模型，并对微器件的几何尺寸和结构进行了优化，以满足振动拾取条件。采用溶胶 - 凝胶和退火技术在硅衬底上制备高质量的PZT薄膜，并利用微机电系统技术制造加速度计微器件。此外，对微机电系统加速度计进行封装，以便在振动测量平台上进行测试。测试结果表明，该PMA的谐振频率为2300 Hz。此外，输入加速度与输出电压之间存在良好的线性关系， = 8.412 - 0.212。该PMA不仅具有高灵敏度，而且具有出色的抗干扰能力。将加速度计结构集成到矢量水听器中，在校准系统中进行测试。结果表明，压电矢量水听器（PVH）在1000 Hz时的灵敏度为 -178.99 dB（0 dB = 1 V/μPa），带宽为20~1100 Hz。同时，它呈现出良好的“8”字形指向性和各通道的一致性。这些结果表明，压电微机电系统加速度计具有适用于矢量水听器的优异性能。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a076/10456523/00cba10b1254/micromachines-14-01598-g015.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a076/10456523/aaa2771b7967/micromachines-14-01598-g001.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a076/10456523/037aca3a9853/micromachines-14-01598-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a076/10456523/281f33f51032/micromachines-14-01598-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a076/10456523/5de0f469670d/micromachines-14-01598-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a076/10456523/05437c688677/micromachines-14-01598-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a076/10456523/ec96d3d72f67/micromachines-14-01598-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a076/10456523/8b4dcb77c150/micromachines-14-01598-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a076/10456523/53a9739fdba3/micromachines-14-01598-g014.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a076/10456523/00cba10b1254/micromachines-14-01598-g015.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a076/10456523/aaa2771b7967/micromachines-14-01598-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a076/10456523/cc3aaeb9e087/micromachines-14-01598-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a076/10456523/b9f6f5eccdab/micromachines-14-01598-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a076/10456523/55bebd581dff/micromachines-14-01598-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a076/10456523/f0634b049e28/micromachines-14-01598-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a076/10456523/0008bbdb8f09/micromachines-14-01598-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a076/10456523/5404defc7431/micromachines-14-01598-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a076/10456523/037aca3a9853/micromachines-14-01598-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a076/10456523/281f33f51032/micromachines-14-01598-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a076/10456523/5de0f469670d/micromachines-14-01598-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a076/10456523/05437c688677/micromachines-14-01598-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a076/10456523/ec96d3d72f67/micromachines-14-01598-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a076/10456523/8b4dcb77c150/micromachines-14-01598-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a076/10456523/53a9739fdba3/micromachines-14-01598-g014.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a076/10456523/00cba10b1254/micromachines-14-01598-g015.jpg

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Fabrication and Underwater Testing of a Vector Hydrophone Comprising a Triaxial Piezoelectric Accelerometer and Spherical Hydrophone.
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Sensors (Basel). 2022 Dec 13;22(24):9796. doi: 10.3390/s22249796.
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