Li Junxiang, Du Yijun, Fan Chen, Zhao Rong, Hu Xiaohan, Wan Jiahao, Yang Xinyu, Cheng Huan, Hu Zirui, Zhao Zixin, Zhao Hong
Opt Express. 2023 Jul 31;31(16):25635-25647. doi: 10.1364/OE.496392.
We propose a fast and robust method for calibrating Spatial Light Modulators (SLMs) based on polarization phase-shifting interferometry. Our method effectively calibrates the SLM by addressing both the static aberration and nonlinear phase response, utilizing specially designed gray images loaded sequentially onto the SLM. Notably, we introduce a novel kinoform that effectively eliminates the influence of tilt phase shift between two shots of the polarization camera. This results in a highly accurate phase aberration map and phase modulation curve with exceptional stability, making it an ideal method to calibrate the SLM with exceptional efficiency and precision in real applications.