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具有宽带响应和高灵敏度的双悬臂压电薄膜传感器的设计与实验评估

Design and Experimental Evaluation of a Dual-Cantilever Piezoelectric Film Sensor with a Broadband Response and High Sensitivity.

作者信息

Xin Wei, He Zhaoyang, Zhao Chaocheng

机构信息

College of Information Science and Technology, Beijing University of Chemical Technology, Beijing 100029, China.

出版信息

Micromachines (Basel). 2023 Nov 17;14(11):2108. doi: 10.3390/mi14112108.

Abstract

Cantilever-beam-type PVDF (Polyvinylidene Fluoride) piezoelectric film sensors are commonly utilized for vibration signal detection due to their simple structures and ease of processing. Traditional cantilevered PVDF piezoelectric film sensors are susceptible to the influence of the second-order vibration mode and have a low lateral stress distribution at the free end, which limit their measurement bandwidth and sensitivity. This study is on the design of a dual-cantilever PVDF piezoelectric film sensor based on the principle of cantilevered piezoelectric film sensors. The results of the experiments indicate that, compared to a typical single-arm piezoelectric cantilever beam vibration sensor, the developed sensor has a longer second-order natural frequency that ranges from 112 Hz to 453 Hz, while the first-order natural frequency is maintained at around 12 Hz. This leads to a better ratio of the second-order natural frequency to the first-order natural frequency and a wider frequency response range. At the same time, the sensitivity is increased by a factor of 3.48.

摘要

悬臂梁式聚偏氟乙烯(PVDF)压电薄膜传感器因其结构简单、易于加工,常用于振动信号检测。传统的悬臂式PVDF压电薄膜传感器易受二阶振动模式的影响,且在自由端的横向应力分布较低,这限制了它们的测量带宽和灵敏度。本研究基于悬臂式压电薄膜传感器的原理,设计了一种双悬臂PVDF压电薄膜传感器。实验结果表明,与典型的单臂压电悬臂梁振动传感器相比,所研制的传感器具有更长的二阶固有频率,范围为112 Hz至453 Hz,而一阶固有频率保持在12 Hz左右。这导致二阶固有频率与一阶固有频率的比值更好,频率响应范围更宽。同时,灵敏度提高了3.48倍。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fb7a/10673016/2d088d9c08b7/micromachines-14-02108-g001.jpg

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