Meng Guodong, She Junyi, Yu Hao, Li Qiang, Liu Xin, Yin Zongyou, Cheng Yonghong
State Key Laboratory of Electrical Insulation and Power Equipment, School of Electrical Engineering, Xi'an Jiaotong University, Xi'an 710049, China.
School of Electronic Science and Engineering, Xi'an Jiaotong University, Xi'an 710049, China.
ACS Appl Mater Interfaces. 2024 Feb 28;16(8):10316-10324. doi: 10.1021/acsami.3c15533. Epub 2024 Feb 21.
Given the requirements for power and dimension scaling, modulating channel transport properties using high gate bias is unfavorable due to the introduction of severe leakages and large power dissipation. Hence, this work presents an ultrathin phototransistor with chemical-vapor-deposition-grown monolayer MoS as the channel and a 10.2 nm thick Al:HfO ferroelectric film as the dielectric. The proposed device is meticulously modulated utilizing an Al:HfO nanofilm, which passivates traps and suppresses charge Coulomb scattering with Al doping, efficiently improving carrier transport and inhibiting leakage current. Furthermore, a bipolar pulses excitable polarization method is developed to induce a nonvolatile electrostatic field. The MoS channel is fully depleted by the switchable and stable floating gate originating from remanent polarization, leading to a high detectivity of 2.05 × 10 Jones per nanometer of gating layer (Jones nm) and photocurrent on/off ratio >10 nm, which are superior to the state-of-the-art phototransistors based on two-dimensional (2D) materials and ferroelectrics. The proposed polarizable nonvolatile ferroelectric gating in a monolayer MoS phototransistor promises a potential route toward ultrasensitive photodetectors with low power consumption that boast of high levels of integration.
鉴于功率和尺寸缩放的要求,由于会引入严重的泄漏和大量功耗,使用高栅极偏置来调制沟道传输特性是不利的。因此,这项工作提出了一种超薄光电晶体管,其沟道采用化学气相沉积生长的单层MoS,电介质采用10.2 nm厚的Al:HfO铁电薄膜。所提出的器件利用Al:HfO纳米薄膜进行精细调制,该薄膜通过Al掺杂钝化陷阱并抑制电荷库仑散射,有效改善载流子传输并抑制漏电流。此外,还开发了一种双极脉冲可激发极化方法来诱导非易失性静电场。MoS沟道被源自剩余极化的可切换且稳定的浮栅完全耗尽,从而实现了每纳米栅极层2.05×10琼斯的高探测率(琼斯·纳米)以及光电流开/关比>10纳米,这优于基于二维(2D)材料和铁电体的现有光电晶体管。在单层MoS光电晶体管中提出的可极化非易失性铁电栅极有望为实现具有低功耗和高集成度的超灵敏光电探测器提供一条潜在途径。