Design and performance simulation of a silica microdisk cavity optical pressure sensor.

The opto-mechanical system of optical whispering-gallery mode (WGM) microcavities confines resonant photons in micro-scale resonators for a long time, which can strongly enhance the interaction between light and matter, making it an ideal platform for various sensors. To measure the slim optical pressure in the interaction between the laser and matter, a silica microdisk cavity sensor with metal film is designed in this paper. In this study, the finite element method was employed to investigate the opto-mechanical coupling mechanism in a microdisk cavity. From the aspects of optics and mechanics, the structural parameters of the sensor were optimized and the performance was simulated. The simulation results show that at 1550 nm, the sensor's optical quality factor () can reach ∼10, the free spectral range is ∼5.3 , the sensing sensitivity is 5.32 / , and the optical force resolution is 6.61×10 , which is better than the thin-film interferometry and optical lever method.