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一种用于智能机器人的具有解耦应变和温度传感功能的柔性双模式传感器。

A flexible dual-mode sensor with decoupled strain and temperature sensing for smart robots.

作者信息

Li Shiying, Yang Mengyu, Wu Yuanzhao, Asghar Waqas, Lu Xingjian, Zhang Haifeng, Cui Enhong, Fang Zaojun, Shang Jie, Liu Yiwei, Li Run-Wei

机构信息

CAS Key Laboratory of Magnetic Materials and Devices, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo, 315201, P. R. China.

Zhejiang Province Key Laboratory of Magnetic Materials and Application Technology, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo, 315201, P. R. China.

出版信息

Mater Horiz. 2024 Dec 9;11(24):6361-6370. doi: 10.1039/d4mh00841c.

DOI:10.1039/d4mh00841c
PMID:39364564
Abstract

Flexible dual mode strain-temperature sensors that mimic human skin functions are highly desired for wearable devices and intelligent robots. However, integrating dual sensing characteristics into a single sensor for simultaneous and decoupled strain-temperature detection still remains a challenge. Herein, we report a flexible dual-modal sensor that uses a "neutral surface" structural design technique to integrate an independently prepared temperature sensing layer (TSL) and strain sensing layer (SSL), for simultaneous monitoring of strain and temperature, in a decoupled manner. The TSL consists of a PDMS/BaTiO based dielectric layer whose dielectric constant and thickness change in response to temperature fluctuations. The SSL consists of a resistive type NiCr film whose resistance changes in response to external strain. After optimizing the temperature and strain sensing characteristics of the TSL and SSL, the obtained dual-modal flexible sensor has shown a broad temperature sensing range (30 to 200 °C), with high temperature sensitivity (-160.90 fF °C), excellent linearity (0.998), and highly discernible temperature resolution (0.1 °C). Additionally, the sensor has also exhibited a wide strain monitoring range (20 to 1000 με), good strain resolution (20 με or 0.002%), and a fast strain response time (54 ms). When practically demonstrated, our sensor has successfully shown independent perception of strain and temperature, which highlights its promising application potential in the fields of smart robotics and intelligent prosthetics.

摘要

模仿人类皮肤功能的柔性双模式应变 - 温度传感器在可穿戴设备和智能机器人领域备受青睐。然而,将双传感特性集成到单个传感器中以实现同时且解耦的应变 - 温度检测仍然是一项挑战。在此,我们报道了一种柔性双模式传感器,它采用“中性表面”结构设计技术,将独立制备的温度传感层(TSL)和应变传感层(SSL)集成在一起,以解耦的方式同时监测应变和温度。TSL由基于PDMS/BaTiO的介电层组成,其介电常数和厚度会随温度波动而变化。SSL由电阻型NiCr薄膜组成,其电阻会随外部应变而变化。在优化了TSL和SSL的温度和应变传感特性后,所获得的双模式柔性传感器显示出宽温度传感范围(30至200°C),具有高温度灵敏度(-160.90 fF/°C)、出色的线性度(0.998)和高分辨温度分辨率(0.1°C)。此外,该传感器还表现出宽应变监测范围(20至1000 με)、良好的应变分辨率(20 με或0.002%)以及快速的应变响应时间(54 ms)。在实际演示中,我们的传感器成功展示了对应变和温度的独立感知,这突出了其在智能机器人和智能假肢领域的广阔应用潜力。

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