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径向电极覆盖对液体部署式压电微机电系统超声换能器性能的影响：一项动态和运动学研究。

Impact of Radial Electrode Coverage on the Performance of Liquid-Deployed PMUTs: A Dynamic and Kinematic Study.

作者信息

Sammut Stephen, Gatt Edward, Borg Ruben Paul

机构信息

Institute of Engineering and Transport, Malta College of Arts, Science and Technology (MCAST), PLA 9032 Paola, Malta.

Faculty of ICT, University of Malta, MSD 2080 Msida, Malta.

出版信息

Micromachines (Basel). 2025 Jan 12;16(1):80. doi: 10.3390/mi16010080.

DOI:10.3390/mi16010080
PMID:39858735
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC11767888/
Abstract

This paper highlights the optimisation of a key design parameter essential to the development of PMUTs, which are part of the transmitting components of microsensors. These microsensors are designed for use in the Structural Health Monitoring of reinforced concrete structures. Enhancing the effectiveness of the transmitting component allows for greater spacing between microsensors, which in turn reduces the number of devices needed to implement a full structural health monitoring system. PMUTs designed for integration into the pore solution of reinforced concrete structures need to operate effectively with liquid coupling fluids to ensure optimal sonic energy transfer into the structure. This paper outlines the techniques employed to optimize the central electrode's percentage radial cover of the piezoelectric layer, in circular PMUTs resonating at around 100 kHz. This optimisation was achieved using Finite Element Modelling, laser vibrometry, and hydrophone experimental techniques. The results demonstrated that a radial electrode cover between 65 and 70% significantly enhances the kinematic and dynamic characteristics of a PMUT's diaphragm when subjected to the excitation of a sine wave electrical signal. The paper also includes advanced time domain finite element analysis, through which the authors aimed to illustrate the diaphragm's movements at various levels of radial electrode coverage.

摘要

本文重点介绍了对微机电超声换能器（PMUTs）开发至关重要的一个关键设计参数的优化，PMUTs是微传感器发射部件的一部分。这些微传感器设计用于钢筋混凝土结构的结构健康监测。提高发射部件的有效性可使微传感器之间的间距更大，进而减少实施完整结构健康监测系统所需的设备数量。设计用于集成到钢筋混凝土结构孔隙溶液中的PMUTs需要与液体耦合流体有效配合，以确保最佳声能传递到结构中。本文概述了在圆形PMUTs中优化压电层中心电极径向覆盖率的技术，该圆形PMUTs在100kHz左右共振。这种优化是通过有限元建模、激光测振和水听器实验技术实现的。结果表明，当受到正弦波电信号激励时，65%至70%的径向电极覆盖率可显著增强PMUT振膜的运动学和动力学特性。本文还包括先进的时域有限元分析，作者旨在通过该分析说明振膜在不同径向电极覆盖率水平下的运动情况。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3818/11767888/ebf67499301d/micromachines-16-00080-g021.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3818/11767888/dfc63d1e5cf1/micromachines-16-00080-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3818/11767888/0eb734466fbe/micromachines-16-00080-g011.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3818/11767888/af8d9b694d55/micromachines-16-00080-g014.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3818/11767888/a60f50ad4eaf/micromachines-16-00080-g015.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3818/11767888/c2e28102b498/micromachines-16-00080-g016.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3818/11767888/5b0740495cc3/micromachines-16-00080-g017.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3818/11767888/4b78f8fec473/micromachines-16-00080-g018.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3818/11767888/1e8c7df79e67/micromachines-16-00080-g019.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3818/11767888/50bc9560aae3/micromachines-16-00080-g020.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3818/11767888/ebf67499301d/micromachines-16-00080-g021.jpg

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本文引用的文献

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On the Dynamics of a Novel Liquid-Coupled Piezoelectric Micromachined Ultrasonic Transducer Designed to Have a Reduced Resonant Frequency and Enhanced Ultrasonic Reception Capabilities.一种新型液耦压电微机械超声换能器的动力学研究，该换能器旨在降低共振频率并增强超声接收能力。
Micromachines (Basel). 2024 Sep 29;15(10):1210. doi: 10.3390/mi15101210.
2
Design optimization of embedded ultrasonic transducers for concrete structures assessment.用于混凝土结构评估的嵌入式超声换能器的设计优化
Ultrasonics. 2017 Aug;79:18-33. doi: 10.1016/j.ultras.2017.04.002. Epub 2017 Apr 9.
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Experiment and simulation validated analytical equivalent circuit model for piezoelectric micromachined ultrasonic transducers.
用于压电微机械超声换能器的实验与仿真验证的解析等效电路模型
IEEE Trans Ultrason Ferroelectr Freq Control. 2015 Apr;62(4):744-65. doi: 10.1109/TUFFC.2014.006725.