Solid-state energy-dispersion spectrometer for electron-microprobe x-ray analysis.

Improved lithium-drifted silicon solid-state detectors allow detection and energy dispersion of x-rays of about 3 to 30 kiloelectron volts in the electron-microprobe x-ray analyzer. Energy resolution is sufficient to separate peaks of characteristic x-rays of elements adjacent in the periodic system at atomic number 20 and higher. The detected x-ray spectrum emitted from an unknown sample can be recorded with a multichannel analyzer in approximately 60 seconds.