The accuracy of quantitation in X-ray microanalysis, particularly of biological specimens.

The accuracy of results of microanalytical analyses depends on errors in the measurement, separation of the signal from interferences such as background, the quality of the theoretical assumptions underlying the evaluation process, the accuracy of constants and parameters used in the evaluation, the propagation of errors through the evaluation, the quality of the reference standards, the preparation of the specimen before analysis, and the damage inflicted upon it during analysis. The meaning of the results in turn is closely related to the manner in which they expressed, and to the localization which can be achieved in microprobe analysis. The latter aspect includes the capability of the operator to orient the exciting beam towards the topographic features of interest on the specimen.