Evaporated germanium films as supports for microanalysis of carbon and silicon containing specimens.

A preparation procedure is described for producing specimen supports of evaporated germanium. The germanium film is used as a replacement for films of carbon and silicon when microanalytical techniques like energy dispersive X-ray microanalysis (XRMA) or electron energy loss spectroscopy (EELS) are focusing on particulates containing these elements. The supports can be produced with high reproducibility within a thickness range of 15 to 30 nm and of a quality suitable also for high resolution transmission electron microscopy.